Probe head for a microelectronic contactor assembly, and methods of making same

1. A probe head, comprising:

a space transformer substrate having a first surface opposite a second surface and a space transforming electrical interconnect therebetween, the space transforming electrical interconnect including electrical contacts on both the first surface and the second surface of the space transformer substrate; and

a probe contactor substrate having a first surface opposite a second surface, the second surface of the probe contactor substrate having a plurality of microelectronic contactors thereon that are electrically connected to the electrical contacts on the second surface of the space transformer substrate;

wherein the probe contactor substrate is bonded to the space transformer substrate only at or near the centers of the probe contactor substrate and the space transformer substrate, with the first surface of the probe contactor substrate facing, the second surface of the space transformer substrate.

2. The probe head of claim 1 , wherein a rigid adhesive bonds the probe contactor substrate to the space transformer substrate at or near the centers of the probe contactor substrate and the space transformer substrate.

3. A method, comprising:

forming a plurality of microelectronic contactors on a probe contactor substrate: and subsequently

depositing a sacrificial material around the microelectronic contactors; and subsequently

planarizing a surface of the probe contactor substrate, the surface being opposite a surface on which the microelectronic contactors are formed; and subsequently

removing the sacrificial material; and subsequently

bonding the surface of the probe contactor substrate opposite the plurality of microelectronic contacts to a space transformer substrate, wherein the plurality of microelectronic contactors are electrically coupled to electrical contacts on the space transformer substrate.

4. The method of claim 3 , wherein the plurality of microelectronic contactors are formed using lithographic processes.

5. The method of claim 3 , wherein the sacrificial material comprises copper.

6. The method of claim 3 , further comprising, between depositing and removing the sacrificial material, planarizing tips of the microelectronic contactors.

7. A method of forming a probe head, comprising:

depositing adhesive elements on at least one of i) a space transformer substrate having a space transforming electrical interconnect, the space transforming electrical interconnect including electrical contacts on first and second opposed surfaces of the space transformer substrate, and ii) a probe contactor substrate having a plurality of microelectronic contactors;

at least partially curing the adhesive elements;

after the at least partial curing, planarizing the adhesive elements;

after the planarizing, positioning the space transformer substrate and the probe contactor substrate with the adhesive elements contacting both the space transformer substrate and the probe contactor substrate: and then

curing the adhesive elements to bond the probe contactor substrate to the space transformer substrate.

8. The method of claim 7 , wherein the cured adhesive elements are compliant at one or more expected operating temperatures of the probe head.

9. The method of claim 7 , further comprising:

prior to planarizing the adhesive elements, depositing a sacrificial material around the adhesive elements: and

removing the sacrificial after the planarizing.

10. The method of claim 7 , wherein the adhesive elements cover about 5% of the total surface area between the probe contactor substrate and the space transformer substrate.

11. The method of claim 7 , further comprising, forming spacers on one of the space transformer and the probe contactor substrate, prior to positioning the space transformer substrate and the probe contactor substrate with the adhesive elements contacting both the space transformer substrate and the probe contactor substrate.

12. The method of claim 7 , wherein the adhesive elements comprise adhesive droplets.

13. A method, comprising:

joining a plurality of tiles to form a probe contactor substrate of joined tiles:

lapping the probe contactor substrate flat;

forming a plurality of microelectronic contactors in parallel, across the joined tiles of the probe contactor substrate; and

bonding a surface of the probe contactor substrate opposite the plurality of microelectronic contactors to a space transformer substrate, wherein the plurality of microelectronic contactors are electrically coupled to electrical contacts on the space transformer substrate.

14. The method of claim 13 , further comprising, using an adhesive to join the plurality of ceramic tiles.

15. The method of claim 13 , wherein the plurality of microelectronic contactors are formed using lithographic processes.

16. The method of claim 13 , further comprising:

depositing a sacrificial material around the microelectronic contactors; and subsequently

planarizing a surface of the probe contactor substrate, the surface being opposite a surface on which the microelectronic contactors are formed; and subsequently

removing the sacrificial material.

17. The method of claim 16 , wherein the sacrificial material comprises copper.

18. The method of claim 16 , further comprising, between depositing and removing the sacrificial material, planarizing tips of the microelectronic contactors.