Semiconductor device
View Patent ↗A semiconductor device includes a first field effect transistor and a second field effect transistor. The first field effect transistor includes a first gate electrode formed; first impurity diffused areas; and first sidewall portions. The first sidewall portions include a first lower insulation film and a first charge accumulation film. The second field effect transistor includes a second gate electrode; second impurity diffused areas; and second sidewall portions. The second sidewall portions include a second lower insulation film and a second charge accumulation film. The first lower insulation film contains one of a silicon thermal oxide film and a non-doped silicate glass, and the second lower insulation film contains a non-doped silicate glass. The second sidewall portions have a width along a gate longitudinal direction larger than that of the first sidewall portions. The second lower insulation film has a thickness larger than that of the first lower insulation film.
1. A semiconductor device comprising:
a semiconductor substrate having a first area and a second area;
a first field effect transistor disposed in the first area, said first field effect transistor including a first gate electrode formed on the semiconductor substrate with a first gate insulation film therebetween, a pair of first impurity diffused areas formed in areas sandwiching the first gate electrode, and a pair of first sidewall portions disposed adjacent to the first gate electrode, said first sidewall portions including a first lower insulation film and a first charge accumulation film laminated sequentially, said first lower insulation film containing at least one of a silicon thermal oxide film and a non-doped silicate glass; and
a second field effect transistor disposed in the second area, said second field effect transistor including a second gate electrode formed on the semiconductor substrate with a second gate insulation film therebetween, a pair of second impurity diffused areas formed in areas sandwiching the second gate electrode, and a pair of second sidewall portions disposed adjacent to the second gate electrode, said second sidewall portions having a width along a gate longitudinal direction larger than that of the first sidewall portions, said second sidewall portions including a second lower insulation film and a second charge accumulation film laminated sequentially, said second lower insulation film containing a non-doped silicate glass, said second lower insulation film having a thickness larger than that of the first lower insulation film.
2. The semiconductor device according to claim 1 , wherein said first sidewall portions have the width in a range of 20 nm to 50 nm; said second sidewall portions have the width in a range of 25 nm to 80 nm; said first lower insulation film has the thickness in a range of 5 nm to 10 nm; and said second lower insulation film has the thickness in a range of 10 nm to 40 nm.
3. The semiconductor device according to claim 1 , wherein said first field effect transistor further includes a first channel forming area in the semiconductor substrate below the first gate electrode; said first field effect transistor further includes a first low concentration impurity diffused area between the first impurity diffused areas, said first low concentration impurity diffused area having an impurity concentration lower than that of the first impurity diffused areas, said first low concentration impurity diffused area having a conductive type same as that of the first impurity diffused areas; said second field effect transistor further includes a second channel forming area in the semiconductor substrate below the first gate electrode; and said second field effect transistor further includes a second low concentration impurity diffused area between the second impurity diffused areas, said second low concentration impurity diffused area having an impurity concentration lower than that of the second impurity diffused areas, said second low concentration impurity diffused area having a conductive type same as that of the second impurity diffused areas.
4. The semiconductor device according to claim 1 , wherein said first lower insulation film is formed of a silicon thermal oxide film, and said first lower insulation film is formed of a laminated film of a non-doped silicate glass and a silicon thermal oxide film laminated sequentially.
5. The semiconductor device according to claim 1 , wherein said first lower insulation film is formed of a non-doped silicate glass, and said first lower insulation film is formed of a non-doped silicate glass.
6. The semiconductor device according to claim 1 , wherein said first lower insulation film is formed of a laminated film of a non-doped silicate glass and a silicon thermal oxide film, and second first lower insulation film is formed of a laminated film of a non-doped silicate glass and a silicon thermal oxide film.