Method of cutting electrical fuse
View Patent ↗A method of cutting an electrical fuse including a first conductor and a second conductor, the first conductor including a first cutting target region, the second conductor branched from the first conductor and connected to the first conductor and including a second cutting target region, which are formed on a semiconductor substrate, the method includes flowing a current in the first conductor, causing material of the first conductor to flow outward near a coupling portion connecting the first conductor to the second conductor, and cutting the first cutting target region and the second cutting target region.
1. A method of cutting an electrical fuse including a first conductor and a second conductor, the first conductor including a first cutting target region, the second conductor branched from said first conductor and connected to said first conductor and including a second cutting target region, which are formed on a semiconductor substrate, comprising:
flowing a current in said first conductor;
causing material of said first conductor to flow outward near a coupling portion connecting said first conductor to said second conductor; and
cutting said first cutting target region and said second cutting target region.
2. The method according to claim 1 , wherein said cutting said first cutting target region is performed simultaneously with said cutting said second cutting target region.
3. The method according to claim 1 , wherein said flowing said current excludes flowing a current across said second conductor.
4. The method according to claim 1 , wherein said flowing of said material of said first conductor is between said second cutting target region.
5. The method according to claim 4 , wherein said cutting including formation of a first void region in said first cutting target region and a second void region in said second cutting target region.
6. A method of cutting an electrical fuse, said electrical fuse comprising a first conductor having a first cutting target region and a second conductor having a second cutting target region, whereby said first and second conductors are coupled together at a coupling region, said method comprising:
causing material of said first conductor to flow outward to the coupling region by flowing a current in said first conductor without flowing a current in said second conductor,
wherein said flowing of said material causes formation of a first void region in said first cutting target region and a second void region in said second cutting target region to cut said electrical fuse.
7. The method according to claim 6 , wherein said first and second void regions are formed simultaneously.
8. The method according to claim 6 , wherein said flowing of said material of said first conductor is between said first cutting target region and said second cutting target region.
9. The method according to claim 6 , further comprising applying a predetermined first potential to said second conductor and detecting a potential of said second conductor.
10. The method according to claim 9 , further comprising, wherein in a state in which said first conductor is grounded, determining that formation of at least one of said first void and said second void has been performed on said electrical fuse if said potential of said second conductor is higher than a reference potential.
11. The method according to claim 9 , further comprising, wherein in a state in which said first conductor is grounded, determining that formation of both of said first void and said second void has not been performed on said electrical fuse if said potential of said second conductor is lower than a reference potential.
12. The method according to claim 6 , further comprising reflecting heat generated by said current flowing in said first conductor using a cover member.
13. The method according to claim 12 , further comprising blocking said flowing material of said first conductor from scattering when said first and second voids are formed using said cover member.