Semiconductor device
View Patent ↗A semiconductor device includes: a first semiconductor device including an interconnect substrate having a cavity structure and a semiconductor element mounted on a bottom part of the cavity structure; and a second semiconductor device provided on and connected to the first semiconductor device via connection terminals. A sealing material is provided between the first semiconductor device and the second semiconductor device. A sloped portion is formed, at a corner portion at which the bottom part and a side wall of the cavity structure in the first semiconductor device meets, to be sloped toward a center part of the cavity structure and have a tapered shape which becomes continuously wider in the direction from an upper part to a lower part.
1. A semiconductor device, comprising:
a first semiconductor device including an interconnect substrate having a cavity structure and a semiconductor element mounted on a bottom part of the cavity structure; and
a second semiconductor device provided on and connected to the first semiconductor device via connection terminals,
wherein
a sealing material is provided between the first semiconductor device and the second semiconductor device, and
a sloped portion is formed, at a corner portion at which the bottom part and a side wall of the cavity structure in the first semiconductor device meets, to be sloped toward a center part of the cavity structure and have a tapered shape which becomes continuously wider in the direction from an upper part to a lower part.
2. The semiconductor device of claim 1 , wherein
the sloped portion is made of resin.
3. The semiconductor device of claim 1 , wherein
the sloped portion is made of a material of which the interconnect substrate is formed.
4. The semiconductor device of claim 3 , wherein
the sloped portion is provided integrally with the interconnect substrate.
5. The semiconductor device of claim 1 , wherein
the semiconductor element is mounted on the bottom part of the cavity structure of the interconnect substrate via a connection material, and
the connection material is provided to reach the sloped portion.
6. The semiconductor device of claim 5 , wherein
the connection material is provided to further reach a side wall of the cavity structure.
7. The semiconductor device of claim 6 , wherein
the connection material is provided to further fill an opening part of the cavity structure.
8. The semiconductor device of claim 1 , wherein
a different material from the connection material is provided between the connection material and the sloped portion to reach the connection material and the sloped portion.
9. The semiconductor device of claim 8 , wherein
the different material from the connection material is provided to further reach a side wall of the cavity structure.
10. The semiconductor device of claim 9 , wherein
the different material from the connection material is provided to further fill an opening part of the cavity structure.
11. The semiconductor device of claim 1 , wherein
the same structure is provided between each of four sides of the semiconductor element and an associated one of side walls of the cavity structure.