Method of fabricating epi-wafer, epi-wafer fabricated by the method, and image sensor fabricated using the epi-wafer

1. A method of fabricating an epi-wafer comprising:

providing a wafer including boron by cutting a single crystal silicon ingot;

growing an insulating layer on one surface of the wafer;

performing thermal treatment of the wafer;

removing the insulating layer formed on one surface of the wafer;

mirror-surface-grinding one surface of the wafer; and

growing an epitaxial layer on one surface of the wafer and forming a high-density boron layer within the wafer to correspond to an interface between the wafer and the epitaxial layer.

2. The method of claim 1 , wherein when the insulating layer is formed on one surface of the wafer, boron on one surface of the wafer is diffused into the wafer to form a high-density boron layer within the wafer.

3. The method of claim 1 , wherein growing of the insulating layer on one surface of the wafer is performed simultaneously with forming a second insulating layer on the other surface of the wafer.

4. The method of claim 1 , further comprising forming a second insulating layer on the other surface of the wafer.

5. The method of claim 1 , wherein the insulating layer is an oxide layer, an oxynitride layer, or a nitride layer.

6. A method of fabricating an epi-wafer comprising:

providing a wafer including high-density boron by cutting a single crystal silicon ingot;

growing an oxide layer on one surface of the wafer by a low-temperature oxidation process;

growing an oxide layer on the other surface of the wafer by a middle-temperature oxidation process to diffuse boron on the other surface of the wafer into the inside of the wafer;

removing the oxide layer formed on the other surface of the wafer;

mirror-surface-grinding the other surface of the wafer; and

growing an epitaxial layer on the other surface of the wafer and forming a high-density boron layer within the wafer that corresponds to an interface between the wafer and the epitaxial layer.

7. The method of claim 6 , further comprising performing thermal treatment of the wafer after the oxide layer is formed on the other surface of the wafer.

8. A method of fabricating an epi-wafer comprising:

providing a wafer including boron by cutting a single crystal silicon ingot;

growing an oxide layer on one surface of the wafer;

removing the oxide layer formed on one surface of the wafer;

mirror-surface-grinding one surface of the wafer; and

growing an epitaxial layer on one surface of the wafer and forming a high-density boron layer within the wafer that corresponds to an interface between the wafer and the epitaxial layer.

9. A method of forming a semiconductor device, the method comprising:

forming a doped semiconductor ingot; cutting the semiconductor ingot into at least one doped sub substrate;

thermally oxidizing the doped sub substrate to form a highly doped layer in an upper surface of the sub substrate and a semiconductor oxide layer above the highly doped layer; removing the semiconductor oxide layer from the sub substrate; and growing an epitaxial layer above the sub substrate and forming a plurality of doped regions within the epitaxial layer.

10. The method of claim 9 , further comprising:

forming a substrate above the sub substrate; and

forming a deep well region of a first conductivity type above the substrate and below the epitaxial layer.

11. The method of claim 9 , wherein the thermal oxidizing forms a doped silicon region within the semiconductor oxide layer.

12. A method of forming a semiconductor device, the method comprising:

forming an ingot with a substantially uniform density of dopants of a first conductivity type;

dividing the ingot into at least one substrate;

growing a silicon oxide layer on the substrate; and

diffusing the dopants into the silicon oxide layer from the substrate,

wherein the density of the dopants in the substrate is increased at a junction between the substrate and silicon oxide layer and decreased in lower portions of the substrate.