Method of production of graphene
The present invention relates to a method of production of graphene comprising the following stages respectively: a stage of deposition of a thin layer comprising amorphous carbon on a substrate; a stage of annealing of said thin layer under photonic and/or electronic irradiation, by which a layer comprising graphene is obtained.
1. A method of producing a layer comprising graphene on a substrate comprising silicon, the method comprising the following steps:
a step of depositing a layer comprising amorphous carbon on said substrate, the amorphous carbon comprising more than 50% of carbon in the sp 2 hybridization state; and
a step of annealing said layer under photonic or electronic irradiation, whereby said layer comprising graphene on said substrate is obtained.
2. The method according to claim 1 , in which the substrate comprising silicon is a substrate of crystalline silicon, a substrate of polysilicon, a substrate of amorphous silicon, a substrate of epitaxial silicon, a substrate of silicon dioxide, a substrate of silicon carbide, a substrate of silicon oxycarbide, a substrate of silicon nitride, a substrate of silicon carbonitride (SiCN), a substrate comprising silicon, oxygen, carbon and fluorine (designated SiOCF), or a substrate of silicon boronitride.
3. The method according to claim 1 , in which the substrate is a substrate with a unit cell having a specific orientation ( 100 ), ( 110 ), ( 111 ) or ( 222 ).
4. The method according to claim 1 , in which the substrate is a substrate of silicon carbide having a specific orientation of the ( 111 ) type.
5. The method according to claim 4 , in which the substrate is grown epitaxially.
6. The method according to claim 1 , in which the step of depositing is carried out by vapour deposition or by wet deposition from at least one carbon-containing precursor.
7. The method according to claim 6 , in which, when the step of depositing is carried out by vapour deposition, it is carried out by physical vapour deposition in the vapour phase or by chemical vapour deposition in the vapour phase.
8. The method according to claim 7 , in which, when the step of depositing is carried out by chemical vapour deposition, it is carried out by filament-assisted chemical vapour deposition, UV-assisted chemical vapour deposition, cryogenic chemical vapour deposition, or plasma-enhanced chemical vapour deposition.
9. The method according to claim 7 , in which the step of depositing is carried out by plasma-enhanced chemical vapour deposition.
10. The method according to claim 6 , in which the carbon-containing precursor is selected from alkanes, alkenes, alkynes, diene compounds, aromatic compounds and mixtures thereof.
11. The method according to claim 1 , in which the step of annealing is carried out at a temperature in the range 20° C. to 1200° C.
12. The method according to claim 1 , in which the photonic irradiation is laser irradiation.