Semiconductor device having sealing film and manufacturing method thereof
View Patent ↗A semiconductor device includes a plurality of wiring lines which are provided on an upper side of a semiconductor substrate and which have connection pad portions, and columnar electrodes are provided on the connection pad portions of the wiring lines. A first sealing film is provided around the columnar electrodes on the upper side of the semiconductor substrate and on the wiring lines. A second sealing film is provided on the first sealing film. The first sealing film is made of a resin in which fillers are not mixed, and the second sealing film is made of a material in which fillers are mixed in a resin.
1. A semiconductor device manufacturing method comprising:
forming a plurality of wiring lines on an upper side of a semiconductor wafer;
forming a first sealing film formation film made of a liquid resin on an upper side of the semiconductor wafer in an atmosphere to fill a gap between the plurality of wiring lines;
carrying out vacuum deaeration for the first sealing film formation film;
forming a second sealing film formation film made of a liquid resin containing fillers on the first sealing film formation film in the atmosphere; and
carrying out the vacuum deaeration for the second sealing film formation film.
2. The semiconductor device manufacturing method according to claim 1 , further comprising forming a plurality of columnar electrodes on connection pads of the wiring lines, respectively.
3. The semiconductor device manufacturing method according to claim 1 , further comprising:
hardening the first and second sealing film formation films by a thermal treatment to form first and second sealing films; and
cutting the semiconductor wafer and the first and second sealing films to obtain a plurality of semiconductor devices.
4. The semiconductor device manufacturing method according to claim 1 , wherein the first sealing film formation film is formed so that the wiring lines are covered and so that an upper surface of the first sealing film formation film is flat.
5. The semiconductor device manufacturing method according to claim 1 , wherein the first sealing film formation film is formed by spin coating.
6. The semiconductor device manufacturing method according to claim 1 , wherein the second sealing film formation film is formed by screen printing.
7. The semiconductor device manufacturing method according to claim 3 , further comprising polishing the second sealing film and upper sides of the columnar electrodes after forming the first and second sealing films.
8. The semiconductor device manufacturing method according to claim 7 , further comprising forming a solder ball on each of the columnar electrodes after the polishing.
9. The semiconductor device manufacturing method according to claim 2 , wherein the vacuum deaeration for the first sealing film formation film is carried out by simultaneously carrying out the vacuum deaeration for a plurality of semiconductor wafers in each of which the columnar electrodes are formed on the connection pad portions of the wiring lines.
10. The semiconductor device manufacturing method according to claim 9 , wherein the vacuum deaeration for the first sealing film formation film is carried out by simultaneously carrying out the vacuum deaeration for the plurality of semiconductor wafers to each of which the first sealing film formation film is provided.
11. The semiconductor device manufacturing method according to claim 1 , wherein the vacuum deaeration for the second sealing film formation film is carried out by simultaneously carrying out the vacuum deaeration for a plurality of semiconductor wafers to each of which the second sealing film formation film is provided.
12. The semiconductor device manufacturing method according to claim 1 , wherein the first sealing film formation film does not include any fillers.
13. The semiconductor device manufacturing method according to claim 9 , wherein the vacuum deaeration for the first sealing film formation film is carried out in a deaerating wafer cassette, and the vacuum deaeration for the second sealing film formation film is carried out in said deaerating wafer cassette.