Current constricting phase change memory element structure
View Patent ↗A layer of nanoparticles having a dimension on the order of 10 nm is employed to form a current constricting layer or as a hardmask for forming a current constricting layer from an underlying insulator layer. The nanoparticles are preferably self-aligning and/or self-planarizing on the underlying surface. The current constricting layer may be formed within a bottom conductive plate, within a phase change material layer, within a top conductive plate, or within a tapered liner between a tapered via sidewall and a via plug contains either a phase change material or a top conductive material. The current density of the local structure around the current constricting layer is higher than the surrounding area, thus allowing local temperature to rise higher than surrounding material. The total current required to program the phase change memory device, and consequently the size of a programming transistor, is reduced due to the current constricting layer.
1. A semiconductor structure comprising:
a phase change material layer;
a current constricting layer abutting said phase change material layer and containing a monolayer of insulating nanoparticles embedded in and separated by a volume of a metal;
a first conductive plate having a first metal portion and in contact with said current constricting layer, wherein said first metal portion is another volume of said metal; and
a second conductive plate having a second metal portion and in contact with said phase change material layer and disjoined from said first conductive plate.
2. The semiconductor structure of claim 1 , wherein said insulating nanoparticles comprise a dielectric material selected from the group consisting of silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, silicon carbide, titanium oxide, tantalum oxide, ruthenium oxide, tungsten oxide, zinc oxide, silicon, germanium, germanium oxide, carbon, and a combination thereof.
3. The semiconductor structure of claim 1 , wherein each of said insulating nanoparticles is a organic molecule confined within a monolayer and having a characteristic dimension in the range from about 1 nm to about 24 nm, said characteristic dimension being selected from the group consisting of a full length, a full width, and a diameter.
4. The semiconductor structure of claim 1 , wherein said phase change material layer comprises an alloy of a chalcogen element with at least one non-chalcogen element, wherein the chalcogen element is selected from the group consisting of Te, Se, and S, and the at least one non-chalcogen element is selected from the group consisting of Ge, Sb, Bi, Pb, Sn, As, Si, P, Ga, In, and Ag.
5. The semiconductor structure of claim 1 , wherein said first and second metal portions comprise a material selected from the group consisting of Ti, Ta, W, Mo, Al, Cu, Pt, Ir, La, Ni, Ru, another elementary metal, and alloys thereof.
6. A semiconductor structure comprising:
a first conductive plate having a first metal portion;
a phase change material layer abutting said first conductive plate and comprising a phase change material;
a current constricting layer comprising a set of disjoined insulating layer islands in a planar arrangement, wherein each of said disjoined insulating layer islands is embedded in and separated by a volume of material that is a metal, has a lateral dimension of a nanoparticle, and directly contacts said first phase change material layer; and
a second conductive plate having a second metal portion including a metal and contacting said current constricting layer.
7. The semiconductor structure of claim 6 , wherein said second conductive plate abuts said current constricting layer.
8. The semiconductor structure of claim 6 , further comprising another phase change material layer consisting of another volume of said phase change material and abutting said current constricting layer and said second conductive plate.
9. The semiconductor structure of claim 6 , wherein said disjoined insulating layer islands has a thickness from about 3 nm to about 60 nm and comprises a dielectric material selected from the group consisting of silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, silicon carbide, titanium oxide, tantalum oxide, ruthenium oxide, tungsten oxide, zinc oxide, silicon, germanium, germanium oxide, carbon, and a combination thereof.
10. The semiconductor structure of claim 6 , wherein said phase change material comprises an alloy of a chalcogen element with at least one non-chalcogen element, wherein the chalcogen element is selected from the group consisting of Te, Se, and S, and the at least one non-chalcogen element is selected from the group consisting of Ge, Sb, Bi, Pb, Sn, As, Si, P, Ga, In, and Ag.
11. The semiconductor structure of claim 1 , wherein said second conductive plate consists of said second metal portion.
12. The semiconductor structure of claim 6 , wherein said first conductive plate consists of said first metal portion.
13. The semiconductor structure of claim 6 , wherein said first and second metal portions comprise a material selected from the group consisting of Ti, Ta, W, Mo, Al, Cu, Pt, Ir, La, Ni, Ru, another elementary metal, and alloys thereof.
14. The semiconductor structure of claim 6 , wherein said second conductive plate contacts said set of disjoined insulating layer islands.