Logical CAD navigation for device characteristics evaluation system
View Patent ↗A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicating circuit design. Specifically, by attaching marks such as rectangles, characters, or lines, to an electron microscope image with software, quick navigation is performed with required minimum information. By using created CAD data, re-navigation with the same equipment and CAD navigation to heterogeneous equipment are performed.
1. A computer readable medium bearing a program for causing a computer to perform the steps of:
displaying a rectangle such that the rectangle is superimposed on an image obtained with a scanning electron microscope, the size of the rectangle on the image being determined based on a setting of a given size;
arranging, based on the previously displayed rectangle, a plurality of equidistant rectangles with the same size as that of the former rectangle;
generating a plurality of numbers indicating vertical or horizontal positions of the plurality of arranged rectangles; and
displaying the plurality of numbers in relevant areas of the arranged rectangles.
2. The computer readable medium according to claim 1 , further comprising the step of inverting the rectangle with respect to an x-axis or an y-axis.
3. The computer readable medium according to claim 1 , further comprising the step of forming another rectangle in the rectangle.
4. The computer readable medium according to claim 1 , further comprising the step of selecting one of the rectangles and copying the rectangle to a different position on the image.
5. The computer readable medium according to claim 3 , wherein the rectangle is inverted before being copied to the different position on the image.
6. The computer readable medium according to claim 1 , wherein the rectangles are made up of grids composed of vertical and horizontal lines with a constant distance therebetween.
7. The computer readable medium according to claim 6 , wherein lengths of the vertical and horizontal lines are adjustable.
8. The computer readable medium according to claim 1 , further comprising the step of storing the rectangle as design data for a semiconductor sample.