Polymer and positive-tone radiation-sensitive resin composition
A polymer includes a repeating unit (a-1) shown by a following formula (a-1), a repeating unit (a-2) shown by a following formula (a-2), and a GPC weight average molecular weight of about 1000 to about 100,000, wherein R 0 represents an alkyl group having 1 to 5 carbon atoms in which at least one hydrogen atom is substituted by a hydroxyl group, and R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, R 2 represents an alkyl group having 1 to 4 carbon atoms, and R 3 represents an alkyl group having 1 to 4 carbon atoms, a substituted or unsubstituted monovalent cyclic hydrocarbon group having 4 to 20 carbon atoms, or a divalent cyclic hydrocarbon group having 4 to 20 carbon atoms formed by R 3 and R 3 bonding to each other together with a carbon atom.
1. A polymer comprising:
a repeating unit (a-1) shown by a following formula (a-1);
a repeating unit (a-2) shown by a following formula (a-2); and
a GPC weight average molecular weight of about 1000 to about 100,000,
wherein R 0 represents an alkyl group having 1 to 5 carbon atoms in which at least one hydrogen atom is substituted by a hydroxyl group, and R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group,
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, R 2 represents an alkyl group having 1 to 4 carbon atoms, and R 3 represents an alkyl group having 1 to 4 carbon atoms, a substituted or unsubstituted monovalent cyclic hydrocarbon group having 4 to 20 carbon atoms, or a divalent cyclic hydrocarbon group having 4 to 20 carbon atoms formed by R 3 and R 3 bonding to each other together with a carbon atom to which the R 3 and R 3 bond.
2. The polymer according to claim 1 , wherein the repeating unit (a-2) comprises at least one of a repeating unit shown by a following formula (a-21) and a repeating unit shown by a following formula (a-22),
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, R 2 represents an alkyl group having 1 to 4 carbon atoms, and k represents an integer from 1 to 10.
3. The polymer according to claim 1 , further comprising at least one of a repeating unit (a-3) shown by a following formula (a-3) and a repeating unit (a-4) having a lactone structure,
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, and R 4 represents a trivalent organic group.
4. The polymer according to claim 1 , wherein the repeating unit (a-1) comprises a structure shown by a following formula (a-5),
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
5. The polymer according to claim 1 , wherein a content of the repeating unit (a-1) in the polymer is about 1 to about 50 mol %.
6. A positive-tone radiation-sensitive resin composition comprising:
a polymer (A) comprising a repeating unit (a-1) shown by a following formula (a-1);
an acid generator (B); and
a solvent (D),
wherein R 0 represents an alkyl group having 1 to 5 carbon atoms in which at least one hydrogen atom is substituted by a hydroxyl group, and R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
7. The composition according to claim 6 , wherein the polymer (A) further comprises a repeating unit (a-2) shown by a following formula (a-2),
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, R 2 represents an alkyl group having 1 to 4 carbon atoms, and R 3 represents an alkyl group having 1 to 4 carbon atoms, a substituted or unsubstituted monovalent cyclic hydrocarbon group having 4 to 20 carbon atoms, or a divalent cyclic hydrocarbon group having 4 to 20 carbon atoms formed by R 3 and R 3 bonding to each other together with a carbon atom to which the R 3 and R 3 bond.
8. The composition according to claim 7 , wherein the repeating unit (a-2) comprises a repeating unit shown by a following formula (a-21) or a repeating unit shown by a following formula (a-22),
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, R 2 represents an alkyl group having 1 to 4 carbon atoms, and k represents an integer from 1 to 10.
9. The composition according to claim 6 , wherein the polymer (A) further comprises at least one of a repeating unit (a-3) shown by a following formula (a-3) and a repeating unit (a-4) having a lactone structure,
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, and R 4 represents a trivalent organic group.
10. The composition according to claim 6 , wherein the repeating unit (a-1) has a structure shown by a following formula (a-5),
wherein R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group.