Flexural vibration piece and oscillator using the same
View Patent ↗A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, ρ th is the thermal resistivity of the heat conduction path, ρ v is the thermal resistivity of the vibrator, t v is the thickness of the vibrator in a direction orthogonal to the first plane, and t th is the thickness of the heat conduction path, a relationship of t th ≧(1/m)×tv×(ρ th /ρ v ) is satisfied.
1. A flexural vibration piece comprising:
a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and
a heat conduction path, between the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region, wherein
when m is the number of heat conduction paths, ρ th , is a thermal resistivity of the heat conduction path, ρ v is a thermal resistivity of the flexural vibrator, t v is a thickness of the flexural vibrator in a direction orthogonal to the first plane, and t th is a thickness of the heat conduction path, a relationship of t th ≧(1/m)×t v ×(ρ th /ρ v ) is satisfied.
2. The flexural vibration piece according to claim 1 , wherein
the heat conduction path is formed on an outer surface of the flexural vibration piece.
3. The flexural vibration piece according to claim 1 , wherein
when fr is a mechanical oscillation frequency of the flexural vibrator, f 20 is a thermal relaxation frequency of the flexural vibration piece, n is a ratio of the circumference of a circle to its diameter, k is a thermal conductivity of a material used for the flexural vibrator in a vibration direction, ρ is a mass density of the material used for the flexural vibrator, C p is a heat capacity of the material used for the flexural vibrator, a is a width of the flexural vibrator in the vibration direction, and f 0 =πk/(2ρC p a 2 ), a relationship of 1>fr/(f 0 +(f 20 −f 0 )/3) is satisfied.
4. The flexural vibration piece according to claim 1 , wherein
when fr is a mechanical oscillation frequency of the flexural vibrator, π is a ratio of the circumference of a circle to its diameter, k is a thermal conductivity of a material used for the flexural vibrator in a vibration direction, ρ is a mass density of the material used for the flexural vibrator, C p is a heat capacity of the material used for the flexural vibrator, a is a width of the flexural vibrator in the vibration direction, and f 0 =πk/(2ρC p a 2 ), 1≧fr/f 0 .
5. The flexural vibration piece according to claim 1 , wherein
the heat conduction path is formed of part of an excitation electrode formed on the flexural vibrator.
6. The flexural vibration piece according to claim 1 , wherein
the heat conduction path is formed of a non-conducting material.
7. An oscillator at least comprising:
the flexural vibration piece according to claim 1 ; and
an oscillator circuit that drives the flexural vibration piece.