IP Library Granted Patent US 7,855,845
Granted Patent B2
US 7,855,845 · App. 12/748,350 · Granted Dec 21, 2010

Optical control system including mount for optical component having independent multi-axial control

Assignee: Newport Corporation
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Quick Facts
Patent No.
US 7,855,845
App. No.
12/748,350
Granted
Dec 21, 2010
Kind
B2
Abstract

An optical control system including a mount for an optical component is disclosed that provides the flexibility of independently adjusting the position and orientation of the optical component along and about one or more axes. In an exemplary embodiment, the mount includes a support element for supporting the optical component; one or more rotational adjustment elements for rotating said support element independently about one or more axes, respectively; and one or more linear adjustment elements for moving said support element independently along one or more axes. The adjustment elements may be manually adjustable and/or may be adjustable by an actuator. In the latter case, the actuator may be electronically controlled by a controller. The optical component may be a reflective, transmissive, or reflective/transmissive optical device, such as diffraction gratings, mirrors, beam splitters, and others.

Claims (74)

1. An optical control system, comprising:

a mount for an optical component, comprising:

a support element for supporting said optical component;

a first adjustment element for moving said support element only along a first axis;

a second adjustment element for rotating said support element only about said first axis;

a third adjustment element for rotating said support element only about a second axis that is substantially orthogonal to said first axis; and

a fourth adjustment element for rotating said support element only along a third axis substantially orthogonal to said first and second axes;

one or more actuators for actuating any one or more of the first, second, third, or third adjustment elements; and

a controller for controlling the one or more actuators to orient and position said optical component.

2. The optical control system of claim 1 , wherein said support element is attached to said second adjustment element.

3. The optical control system of claim 1 , wherein said second adjustment element is pivotally coupled to said third adjustment element.

4. The optical control system of claim 1 , wherein said first adjustment element is coupled to said third adjustment element.

5. The optical control system of claim 4 , wherein said first adjustment element is coupled to said third adjustment element by way of a bridge element.

6. The optical control system of claim 1 , wherein said first adjustment element comprises an adjustment device for manually adjusting said movement of said support element only along said first axis.

7. The optical control system of claim 1 , wherein said first adjustment element is adapted to receive an actuator arm for adjusting said movement of said support element only along said first axis.

8. The optical control system of claim 1 , wherein said second adjustment element comprises an adjustment device for manually adjusting said rotation of said support element only about said first axis.

9. The optical control system of claim 1 , wherein said second adjustment element is adapted to receive an actuator arm for adjusting said rotation of said support element only about said first axis.

10. The optical control system of claim 1 , wherein said third adjustment element comprises an adjustment device for manually adjusting said rotation of said support element only about said second axis.

11. The optical control system of claim 1 , wherein said third adjustment element is adapted to receive an actuator arm for adjusting said rotation of said support element only along said second axis.

12. The optical control system of claim 1 , wherein said fourth adjustment element comprises an adjustment device for manually adjusting said rotation of said support element only along said third axis.

13. The optical control system of claim 1 , wherein said fourth adjustment element is adapted to receive an actuator arm for adjusting said rotation of said support element only along said third axis.

14. The optical control system of claim 1 , wherein said fourth adjustment element supports said support element, and said first, second, and third adjustment elements.

15. The optical control system of claim 1 , wherein said optical component comprises a substantially optically reflective device.

16. The optical control system of claim 1 , wherein said optical component comprises a substantially optically transmissive device.

17. The optical control system of claim 1 , wherein said optical component comprises a diffraction grating, mirror, or beam splitter.

18. An optical control system, comprising:

a mount for an optical component, comprising:

a support assembly for supporting said optical component;

a first adjustment assembly for moving said support assembly along a first axis;

a second adjustment assembly for rotating said support assembly about said first axis;

a third adjustment assembly for rotating said support assembly about a second axis that is substantially orthogonal to said first axis; and

a rotatable stage comprising a lower fixed portion and an upper rotatable portion that rotates about a third axis that is substantially orthogonal to said first and second axes, wherein said rotatable stage supports said first, second, and third assemblies;

one or more actuators for actuating any one or more of the first, second, or third adjustment assembly, or the rotatable stage; and

a controller for controlling the one or more actuators to orient and position said optical component.

19. The optical control system of claim 18 , wherein said support assembly comprises:

a first support member adapted to contact a first end of said optical component; and

a second support member adapted to contact a second end of said optical component.

20. The optical control system of claim 19 , wherein said first and second support members are attached to said second adjustment assembly.

21. The optical control system of claim 19 , wherein said first and second support members are adapted to attach to said second adjustment assembly at different predetermined locations to accommodate different sizes for said optical component.

22. The optical control system of claim 18 , wherein said second adjustment assembly is rotationally coupled said third adjustment assembly.

23. The optical control system of claim 18 , further comprising a lock for locking said second adjustment assembly to a selected orientation.

24. The optical control system of claim 18 , wherein said third adjustment assembly is pivotally coupled said first adjustment assembly.

25. The optical control system of claim 24 , wherein said third adjustment assembly is pivotally coupled to said first adjustment assembly via a bridge assembly.

26. The optical control system of claim 18 , further comprising a lock for locking said third adjustment assembly to a selected orientation.

27. The optical control system of claim 18 , further comprising a base including a channel through which said first adjustment assembly moves along said z-axis.

28. The optical control system of claim 18 , further comprising a lock for locking said first adjustment assembly to a selected position.

29. The optical control system of claim 18 , further comprising a lock for locking said rotatable stage to a selected orientation.

30. An optical control system, comprising:

a mount for an optical component, comprising:

a support assembly for supporting said optical component;

a first adjustment assembly for moving said support assembly along a first axis;

a second adjustment assembly for rotating said support assembly about said first axis;

a third adjustment assembly for rotating said support assembly about a second axis that is substantially orthogonal to said first axis, wherein said second adjustment assembly is rotationally coupled said third adjustment assembly; and a spring attached to said second and third adjustment assemblies to angularly bias said second adjustment assembly about said first axis;

one or more actuators for actuating any one or more of the first, second, or third adjustment assembly; and

a controller for controlling the one or more actuators to orient and position said optical component.

31. An optical control system, comprising:

a mount for an optical component, comprising:

a support assembly for supporting said optical component;

a first adjustment assembly for moving said support assembly along a first axis;

a second adjustment assembly for rotating said support assembly about said first axis;

a third adjustment assembly for rotating said support assembly about a second axis that is substantially orthogonal to said first axis, wherein said third adjustment assembly is pivotally coupled to said first adjustment assembly via a bridge assembly; and

a spring attached to said bridge and third adjustment assemblies to angularly bias said third adjustment assembly about said second axis;

one or more actuators for actuating any one or more of the first, second, or third adjustment assembly; and

a controller for controlling the one or more actuators to orient and position said optical component.

32. An optical control system, comprising:

a mount for an optical component, comprising:

a support assembly for supporting said optical component;

a first adjustment assembly for moving said support assembly along a first axis;

a second adjustment assembly for rotating said support assembly about said first axis;

a third adjustment assembly for rotating said support assembly about a second axis that is substantially orthogonal to said first axis;

a base including a channel through which said first adjustment assembly moves along said z-axis; and

a spring attached to said base and said first adjustment assembly to bias said base against an adjustment device of said first adjustment assembly;

one or more actuators for actuating any one or more of the first, second, or third adjustment assembly; and

a controller for controlling the one or more actuators to orient and position said optical component.

Assignments (13)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 14, 2012
From: HEUSER, MICHAEL; GUERRERO, CHRISTOPHER
To: NEWPORT CORPORATION
Reel/Frame 027713/0191 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
Continuity (3)
Division 1182884100 · Jul 26, 2007
Provisional Application 6083752200 · Aug 14, 2006
Related Publication 20100188750A1 · Jul 29, 2010