Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same
Provided are a heating device, a substrate processing apparatus, and a method of manufacturing a semiconductor device, which can suppress differences between heating bodies, and simultaneously, can suppress shearing of a holder due to thermal deformation of the heating element. The heating device comprises: a heating element including a mountain part and a valley part that are alternately connected in plurality in a meander shape with both ends being fixed; holding body receiving parts respectively installed at ends of the valley parts and formed as cutout parts having a width larger than a width of the valley part; an insulating body installed at an outer circumference of the heating element; and a holding body disposed in the holding body receiving part and fixed to the insulating body.
1. A heating device comprising:
a heating element including a plurality of mountain parts consecutively connected to form a meander shape, each mountain part, of the plurality of mountain parts, including a front end and a holding body receiving part,
wherein the front end of the mountain part is bent at an obtuse angle with respect to a portion of the mountain art other than the front end of the mountain part, and
wherein a width of the holding body receiving part is larger than a width of a space between two adjacent mountain parts of the plurality of mountain parts;
an insulating body surrounding the heating element and comprising a groove disposed on an inner circumferential surface thereof to accommodate the heating element,
wherein a first sidewall and a second sidewall of the groove are respectively inclined at the obtuse angle with respect to a bottom surface of the groove such that the groove accommodates the heating element; and
a holding body disposed in the holding body receiving part and fixing the heating element to the insulating body,
wherein two ends of the heating element are fixed to the insulating body.
2. The heating device of claim 1 , wherein a distance between the bottom surface of the groove and each of the plurality of mountain parts adjacent to the bottom surface is set according to a position with respect to the two ends of the heating element.
3. The heating device of claim 2 , wherein the distance varies in at least one portion of the heating element when the heating element is at a room temperature.
4. The heating device of claim 3 , wherein the distance is identical for each of the plurality of mountain parts when the heating element is at a substrate processing temperature.
5. The heating device of claim 1 , wherein the width of the holding body receiving part increases as a distance between the holding body receiving part and the two ends of the heating element increases to suppress an interference between the holding body receiving part and the holding body caused by thermal expansion of the heating element.
6. The heating device of claim 1 , wherein a position of the holding body in the holding body receiving part is set according to a position of the holding body receiving part with respect to the two ends of the heating element.
7. A substrate processing apparatus comprising:
a heating device; and
a process chamber installed in the heating device to process a substrate,
wherein the heating device comprises:
a heating element including a plurality of mountain parts consecutively connected to form a meander shape, each mountain part, of the plurality of mountain parts, including a front end and a holding body receiving part,
wherein the front end of the mountain part is bent at an obtuse angle with respect to a portion of the mountain part other than the front end of the mountain part, and
wherein a width of the holding body receiving part is larger than a width of a space between two adjacent mountain parts of the plurality of mountain parts;
an insulating body surrounding the heating element and comprising a groove disposed on an inner circumferential surface thereof to accommodate the heating element,
wherein a first sidewall and a second sidewall of the groove are respectively inclined at the obtuse angle with respect to a bottom surface of the groove such that the groove accommodates the heating element; and
a holding body disposed in the holding body receiving part and fixing the heating element to the insulating body,
wherein two ends of the heating element are fixed to the insulating body.