Sensor element isolation in a backside illuminated image sensor
The present disclosure provides methods and apparatus for sensor element isolation in a backside illuminated image sensor. In one embodiment, a method of fabricating a semiconductor device includes providing a sensor layer having a frontside surface and a backside surface, forming a plurality of frontside trenches in the frontside surface of the sensor layer, and implanting oxygen into the sensor layer through the plurality of frontside trenches. The method further includes annealing the implanted oxygen to form a plurality of first silicon oxide blocks in the sensor layer, wherein each first silicon oxide block is disposed substantially adjacent a respective frontside trench to form an isolation feature. A semiconductor device fabricated by such a method is also disclosed.
1. A method of fabricating a semiconductor device, the method comprising:
providing a sensor layer having a frontside surface and a backside surface;
forming a plurality of frontside trenches in the frontside surface of the sensor layer;
implanting oxygen into the sensor layer through the plurality of frontside trenches;
annealing the implanted oxygen to form a plurality of first silicon oxide blocks in the sensor layer, wherein each first silicon oxide block is disposed substantially adjacent a respective frontside trench to form an isolation feature, and wherein each first silicon oxide block has a refractive index less than a refractive index of the sensor layer; and
forming a plurality of backside trenches in the backside surface of the sensor layer, wherein each first silicon oxide block substantially adjoins a vertically-aligned frontside trench and backside trench.
2. The method of claim 1 , further comprising:
forming a plurality of backside trenches in the backside surface of the sensor layer;
implanting oxygen into the sensor layer through the backside trenches; and
annealing the oxygen implanted through the backside trenches to form a plurality of second silicon oxide blocks in the sensor layer, wherein each second silicon oxide block is disposed substantially between a respective backside trench and a vertically-aligned first silicon oxide block.
3. The method of claim 1 , wherein the implanting of oxygen into the sensor layer is performed at a dosage level between about 10 11 atoms/cm 3 and about 10 18 atoms/cm 3 .
4. The method of claim 1 , wherein the annealing of the implanted oxygen is performed at an annealing temperature between about 800 degrees Celsius and about 1500 degrees Celsius.
5. The method of claim 1 , wherein the implanting of oxygen into the sensor layer is performed at a dosage level below about 10 18 atoms/cm 3 , and annealing of the implanted oxygen is performed at an annealing temperature below about 1350 degrees Celsius.
6. The method of claim 1 , wherein each silicon oxide block has a refractive index between about 4.4 and about 4.6.
7. The method of claim 1 , further comprising:
filling the frontside trenches with silicon dioxide having a refractive index of about 1.46; and
filling the backside trenches with silicon dioxide having a refractive index of about 1.46.
8. The method of claim 1 , further comprising:
providing a plurality of photodetectors, each photodetector of the plurality of photodetectors disposed between two adjacent isolation features.
9. A method of fabricating a semiconductor device, the method comprising:
providing a sensor layer having a frontside surface and a backside surface;
forming a plurality of frontside trenches in the frontside surface of the sensor layer;
implanting oxygen into the sensor layer through the plurality of frontside trenches;
annealing the oxygen implanted through the plurality of frontside trenches to form a plurality of first silicon oxide blocks, wherein each first silicon oxide block has a refractive index less than a refractive index of the sensor layer;
forming a plurality of backside trenches in the backside surface of the sensor layer;
implanting oxygen into the sensor layer through the plurality of backside trenches; and
annealing the oxygen implanted through the plurality of backside trenches to form a plurality of second silicon oxide blocks, wherein each second silicon oxide block has a refractive index less than the refractive index of the sensor layer, each group of vertically-aligned first and second silicon oxide blocks substantially adjoining a vertically-aligned frontside trench and backside trench to form an isolation feature.
10. The method of claim 9 , wherein the implanting of oxygen into the sensor layer is performed at a dosage level between about 10 11 atoms/cm 3 and about 10 18 atoms/cm 3 and about, and annealing of the implanted oxygen is performed at an annealing temperature between about 800 degrees Celsius and about 1500 degrees Celsius.
11. The method of claim 9 , wherein the implanting of oxygen into the sensor layer is performed at a dosage level below about 10 18 atoms/cm 3 , and annealing of the implanted oxygen is performed at an annealing temperature below about 1350 degrees Celsius.
12. The method of claim 9 , wherein each first and second silicon oxide block has a refractive index between about 4.4 and about 4.6.
13. The method of claim 9 , further comprising:
filling the frontside trenches with silicon dioxide having a refractive index of about 1.46; and
filling the backside trenches with silicon dioxide having a refractive index of about 1.46.
14. The method of claim 9 , further comprising:
providing a plurality of photodetectors, each photodetector of the plurality of photodetectors disposed between two adjacent isolation features.
15. A method of fabricating a semiconductor device, the method comprising:
providing a sensor layer having a first surface and a second surface opposite the first surface;
forming a plurality of first trenches in the sensor layer, the first trenches being formed from the first surface;
implanting oxygen into the sensor layer through the first trenches in a manner so that the oxygen is implanted below the plurality of first trenches;
annealing the implanted oxygen to form a plurality of dielectric blocks that are each vertically aligned with a respective one of the first trenches, wherein at least two of the plurality of dielectric blocks have non-uniform depth in the sensor layer, and wherein each dielectric block has a refractive index less than a refractive index of the sensor layer; and
forming a plurality of second trenches in the sensor layer, the second trenches being formed from the second surface, wherein each of the second trenches is vertically aligned with a respective one of the dielectric blocks.
16. The method of claim 15 , further comprising:
implanting oxygen into the sensor layer through the second trenches in a manner so that the oxygen is implanted between the first and second trenches;
annealing the oxygen implanted into the sensor layer through the second trenches to form a plurality of additional dielectric blocks that are each vertically aligned with, and disposed in between, respective ones of the first and second trenches.
17. The method of claim 15 , further comprising: forming a plurality of radiation-sensing regions in the sensor layer, wherein the radiation-sensing regions are each operable to sense a radiation wave that enters the sensor layer through the second surface.
18. The method of claim 15 , wherein:
the implanting of oxygen into the sensor layer is carried out using an implant dosage level in a range from about 10 11 atoms/cm 3 to about 10 18 atoms/cm 3 ; and
the annealing of the implanted oxygen is carried out at an annealing temperature in a range from about 800 degrees Celsius to about 1500 degrees Celsius.