Patent Application
Utility
App. No. 12/758,554
· Confirmation No. 5188
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INSTALLATION
Inventors:
Jess KOEHLER, Johannes Wangler, Markus Brotsack, Wolfgang Singer, Damian Fiolka, Manfred Maul
Abandoned -- Failure to Respond to an Office Action
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| 2013-03-18 | ABN |
Abandonment | 2 | View | |
| 2012-08-16 | OA.POSTCARD |
A courtesy postcard sent by USPTO to users who opt-in for e-Office Action | 1 | View | |
| 2012-08-08 | CTNF |
Non-Final Rejection | 8 | View | |
| 2012-08-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-08-08 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2012-08-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-08-08 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2012-08-08 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2012-08-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2012-08-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2012-07-10 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2012-07-10 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2011-02-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2011-02-16 | FOR |
Foreign Reference | 33 | View | |
| 2011-02-16 | FOR |
Foreign Reference | 36 | View | |
| 2011-02-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-02-16 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-08-05 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2010-07-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-07-09 | FOR |
Foreign Reference | 17 | View | |
| 2010-07-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-07-09 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-04-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-04-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2010-04-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-04-13 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-04-12 | TRNA |
Transmittal of New Application | 2 | View | |
| 2010-04-12 | ADS |
Application Data Sheet | 4 | View | |
| 2010-04-12 | SPEC |
Specification | 36 | View | |
| 2010-04-12 | CLM |
Claims | 1 | View | |
| 2010-04-12 | ABST |
Abstract | 1 | View | |
| 2010-04-12 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2010-04-12 | OATH |
Oath or Declaration filed | 12 | View | |
| 2010-04-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-04-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-04-12 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Jess KOEHLER
Immenstaad, GERMANY
Johannes Wangler
Koenigsbronn, GERMANY
Markus Brotsack
Notzing, GERMANY
Wolfgang Singer
Aalen, GERMANY
Damian Fiolka
Oberkochen, GERMANY
Manfred Maul
Aalen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/67
G03F7/20
G03F7/70116
G03F7/702
Prosecution
- Examiner
- RIDDLE, CHRISTINA A
- Art Unit
- 2882
- Customer No.
- 23373
- Docket No.
- Q117860
- Confirmation No.
- 5188
Foreign Priority
103 43 333.3
·
2003-09-12
·
GERMANY
10 2004 010 571.5
·
2004-02-26
·
GERMANY
Publication
- Pub. No.
- US20100195077A1
- Pub. Date
- 2010-08-05
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Quick Facts
- App. No.
- 12/758,554
- Filed
- 2010-04-12
- Pub. No.
- US20100195077A1
- Examiner
- RIDDLE, CHRISTINA A
- Art Unit
- 2882
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