Particle detection system
This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 10 10 gain and maximum signal output at more than mini Ampere (mA) level.
1. A particle detection system comprising:
a charged particle multiplier device for receiving original particles to be detected and generating a plurality of charged particles with a first level gain;
a charged particle detection device for receiving the plurality of charged particles and generating output signal corresponding to the original particles; and
a drift tube type housing enclosing the charged particle multiplier device and the charged particle detection device;
wherein an electric potential is applied between said charged particle multiplier device and said charged particle detection device to accelerate the plurality of charged particles to arrive said charged particle detection device to obtain a second level gain.
2. The particle detection system according to claim 1 , wherein said charged particle detection device is a semiconductor photo diode.
3. The particle detection system according to claim 2 , wherein said original particles are charged.
4. The particle detection system according to claim 3 , wherein said charged particle multiplier device is a microchannel plate.
5. The particle detection system according to claim 4 , wherein gain of the particle detection system can be adjusted by the microchannel plate.
6. The particle detection system according to claim 3 , wherein said original particles are electrons.
7. The particle detection system according to claim 6 , wherein said charged particle multiplier device is an electron multiplier.
8. The particle detection system according to claim 2 , wherein said original particles are photons.
9. The particle detection system according to claim 8 , wherein said charged particle multiplier device includes phosphor, photo cathode, and a microchannel plate.
10. The particle detection system according to claim 8 , wherein said charged particle multiplier device includes phosphor, photo cathode, and an electron multiplier.
11. The particle detection system according to claim 1 , wherein gain of the particle detection system can be adjusted by the electric potential.
12. The particle detection system according to claim 11 , wherein the electric potential can be ranged from 5 KV to 15 KV.
13. The particle detection system according to claim 1 , further comprising a metal mesh placed in front of said charged particle multiplier device.
14. An electron detection system, comprising:
a microchannel plate for receiving original electrons to be detected and generating a plurality of charged particles;
a semiconductor photodiode for receiving the plurality of charged particles and generating output signal corresponding to the original electrons; and
a drift tube type housing enclosing the charged particle multiplier device and the charged particle detection device;
wherein an electric potential is applied between said microchannel plate and said semiconductor photodiode to accelerate the plurality of charged particles to arrive said semiconductor photodiode.
15. The electron detection system according to claim 14 , wherein gain of the electron detection system can be adjusted by the electric potential.
16. The electron detection system according to claim 15 , wherein the electric field can be ranged from 5 KV to 15 KV.
17. The electron detection system according to claim 16 , further comprising a metal mesh placed in front of said microchannel plate.
18. The electron detection system according to claim 14 , wherein gain of the electron detection system can be adjusted by the microchannel plate.