Method and an apparatus for growing a silicon single crystal from a melt
View Patent ↗Silicon single crystals are grown from the melt by providing the melt in a crucible; imposing a horizontal magnetic field on the melt; directing a gas between the single crystal and a heat shield to a melt free surface, and controlling the gas to flow over a region of the melt free surface extending in a direction substantially perpendicular to the magnetic induction. A suitable apparatus has a crucible for holding the melt; a heat shield surrounding the silicon single crystal having a lower end which is connected to a bottom cover facing a melt free surface and a non-axisymmetric shape with respect to a crucible axis, such that gas which is directed between the crystal and the heat shield to the melt free surface is forced to flow over a region of the melt which extends substantially perpendicular to the magnetic induction.
1. A method for growing a silicon single crystal from a melt, comprising
providing the melt in a crucible;
imposing a horizontal magnetic field on the melt having a magnetic induction B at a field center C;
directing a gas between the silicon single crystal and a heat shield to a melt free surface, and
controlling the gas such that the gas is forced to flow in a non-axisymmetric way with respect to a center axis M of the crucible over a region of the melt free surface which extends in a direction substantially perpendicular to the magnetic induction B.
2. The method of claim 1 , wherein the region forms a sector of the melt free surface having a center angle α which is not less than 45° and not more than 135° and wherein the sector comprises a center axis D which is aligned perpendicular to the magnetic induction B or in a direction deviating up to −30° or +30° from a perpendicular alignment.
3. The method of claim 1 , comprising controlling the gas to flow over the region of the melt free surface during crystal growth by turning the heat shield.
4. The method of claim 2 , comprising controlling the gas to flow over the region of the melt free surface during crystal growth by turning the heat shield.
5. The method of claim 1 , comprising driving gas out of the crucible in a direction substantially perpendicular to the magnetic induction B.
6. The method of claim 2 , comprising driving gas out of the crucible in a direction substantially perpendicular to the magnetic induction B.
7. The method of claim 3 , comprising driving gas out of the crucible in a direction substantially perpendicular to the magnetic induction B.
8. The method of claim 4 , comprising driving gas out of the crucible in a direction substantially perpendicular to the magnetic induction B.