METHODS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
1 . A method of adjusting the planarity of a substrate in a probe card assembly, the method comprising:
deflecting at least one of a first area of the substrate, a second area of the substrate, a third area of the substrate, and a fourth area of the substrate;
said deflecting comprising applying a pulling force to said at least one of said first, second, third, and fourth areas of the substrate.
2 - 10 . (canceled)