Method for forming a Schottky diode having a metal-semiconductor Schottky contact
View Patent ↗A method for forming a metal-semiconductor Schottky contact in a well region is provided. The method includes forming a first insulating layer overlying a shallow trench isolation in the well region; and removing a portion of the first insulating layer such that only the well region and a portion of the shallow trench isolation is covered by a remaining portion of the first insulating layer. The method further includes forming a second insulating layer overlying the remaining portion of the first insulating layer and using a contact mask, forming a contact opening in the second insulating layer and the remaining portion of the first insulating layer to expose a portion of the well region. The method further includes forming the metal-semiconductor Schottky contact in the exposed portion of the well region by forming a metal layer in the contact opening and annealing the metal layer.
1. A method for forming a metal-semiconductor Schottky contact in a well region, the method comprising:
forming shallow trench isolation in the well region to form a first well region separated from a second well region by the shallow trench isolation;
forming a first insulating layer overlying the shallow trench isolation, the first well region, and the second well region;
removing a portion of the first insulating layer such that only the first well region and a portion of the shallow trench isolation is covered by a remaining portion of the first insulating layer;
forming a highly doped region in the second well region;
siliciding a top portion of the highly doped region to form a silicide layer;
forming a second insulating layer overlying the remaining portion of the first insulating layer and the silicide layer;
using a contact mask, forming a contact opening in the second insulating layer and the remaining portion of the first insulating layer to expose a portion of the first well region; and
forming the metal-semiconductor Schottky contact in the exposed portion of the first well region by forming a metal layer in at least a portion of the contact opening and annealing the metal layer.
2. The method of claim 1 , wherein the metal-semiconductor Schottky contact opening has a first area and the first well region has a second area, and wherein the first area is smaller than the second area.
3. The method of claim 1 further comprising:
prior to forming the first insulating layer, forming a gate dielectric layer overlying the first well region and the second well region;
removing a portion of the gate dielectric layer such that only the first well region and the portion of the shallow trench isolation is covered by a remaining portion of the gate dielectric layer; and
using the contact mask, forming the contact opening in the gate dielectric layer to expose the portion of the first well region.
4. The method of claim 1 further comprising:
using the contact mask, forming a second contact opening in the second insulating layer to expose a portion of the silicide layer.
5. The method of claim 1 further comprising:
forming a contact plug in the contact opening by filling the contact opening with a conductive material.
6. The method of claim 1 , wherein the metal layer comprises titanium and wherein the step of forming the metal-semiconductor Schottky contact comprises one of collimated sputtering or ionized metal plasma deposition process to form the metal layer in the contact opening.
7. The method of claim 1 further comprising:
prior to siliciding the top portion of the highly doped region, annealing the second well region.
8. A method for forming a Schottky diode in a well region, the method comprising:
forming shallow trench isolation in the well region to form a first well region separated from a second well region by the shallow trench isolation;
forming a gate dielectric layer overlying the first well region and second well region;
forming a first insulating layer overlying the gate dielectric layer;
removing a portion of the first insulating layer and a portion of the gate dielectric layer such that only the first well region and a portion of the shallow trench isolation is covered by a remaining portion of the first insulating layer and a remaining portion of the gate dielectric layer;
forming a highly doped region in the second well region;
siliciding a top portion of the highly doped region to form a silicide layer;
forming a second insulating layer overlying the remaining portion of the first insulating layer and the silicide layer;
using a contact mask, forming a contact opening in the second insulating layer, the remaining portion of the first insulating layer, and the remaining portion of the gate dielectric layer to expose a portion of the first well region;
forming a metal-semiconductor Schottky contact in the exposed portion of the first well region by forming a metal layer in at least a portion of the contact opening and annealing the metal layer such that the Schottky diode is formed with the metal-semiconductor Schottky contact as an anode and the highly doped region as a cathode.
9. The method of claim 8 , wherein the metal-semiconductor Schottky contact has a first area and the first well region has a second area, and wherein the first area is smaller than the second area.
10. The method of claim 8 further comprising:
using the contact mask, forming a second contact opening in the second insulating layer to expose a portion of the silicide layer.
11. The method of claim 8 further comprising:
forming a contact plug in the contact opening by filling the contact opening with a conductive material.
12. The method of claim 8 , wherein the metal layer comprises titanium and wherein the step of forming the metal-semiconductor Schottky contact comprises using one of collimated sputtering or ionized metal plasma deposition to form the metal layer in the contact opening.
13. The method of claim 8 further comprising:
prior to siliciding the top portion of the highly doped region, annealing the second well region.
14. A method for forming a titanium-silicon Schottky contact in a well region, wherein the well region comprises silicon, the method comprising:
forming shallow trench isolation in the well region to form a first well region separated from a second well region by the shallow trench isolation;
forming a first insulating layer overlying the shallow trench isolation, the first well region, and the second well region;
removing a portion of the first insulating layer such that only the first well region and a portion of the shallow trench isolation is covered by a remaining portion of the first insulating layer;
forming a highly doped region in the second well region;
siliciding a top portion of the highly doped region to form a silicide layer;
forming a second insulating layer overlying the remaining portion of the first insulating layer and the silicide layer;
using a contact mask, forming a contact opening in the second insulating layer and the remaining portion of the first insulating layer to expose a portion of the first well region; and
forming the titanium-silicon Schottky contact in the exposed portion of the first well region by using a titanium layer and a titanium-nitride layer in at least a portion of the contact opening and annealing the titanium layer and the titanium-nitride at a predetermined temperature for at least a predetermined duration selected to obtain a low resistance at the titanium-silicon Schottky contact.
15. The method of claim 14 , wherein the titanium-silicon Schottky contact has a first area and the first well region has a second area, and wherein the first area is smaller than the second area.
16. The method of claim 14 further comprising:
prior to forming the first insulating layer, forming a gate dielectric layer overlying the first well region and the second well region;
removing a portion of the gate dielectric layer such that only the first well region and the portion of the shallow trench isolation is covered by a remaining portion of the gate dielectric layer; and
using the contact mask, forming the contact opening in the gate dielectric layer to expose the portion of the first well region.
17. The method of claim 14 further comprising:
using the contact mask, forming a second contact opening in the second insulating layer to expose a portion of the silicide layer.
18. The method of claim 14 further comprising:
forming a contact plug in the contact opening by filling the contact opening with a conductive material.
19. The method of claim 14 , wherein the step of forming the titanium-silicon Schottky contact comprises using one of collimated sputtering or ionized metal plasma deposition to form the titanium layer in the contact opening.
20. The method of claim 14 further comprising:
prior to siliciding the top portion of the highly doped region, annealing the second well region.