Vertical structure LED device and method of manufacturing the same
View Patent ↗A method of manufacturing a vertical structure light emitting diode device, the method including: sequentially forming a first conductivity type III-V group compound semiconductor layer, an active layer, and a second conductivity type III-V group compound semiconductor layer on a substrate for growth; bonding a conductive substrate to the second conductivity type III-V group compound semiconductor layer; removing the substrate for growth from the first conductivity type III-V group compound semiconductor layer; and forming an electrode on an exposed portion of the first conductive III-V group compound semiconductor layer due to the removing the substrate for growth, wherein the bonding a conductive substrate comprises partially heating a metal bonding layer by applying microwaves to a bonding interface while bringing the metal bonding layer into contact with the bonding interface.
1. A vertical structure light emitting diode device comprising:
a conductive substrate;
a first diffusion barrier metal layer disposed directly on the conductive substrate;
a metal bonding layer formed directly on the first diffusion barrier metal layer then;
a second diffusion barrier metal layer formed directly on the metal bonding layer then;
a reflective metal layer disposed directly on the second diffusion barrier metal layer then;
a second conductivity type III-V group compound semiconductor layer, an active layer, and a first conductivity type III-V group compound semiconductor layer,
sequentially and directly deposited on reflective metal layer then;
an electrode formed on the first conductivity type III-V group compound semiconductor layer.
2. The device of claim 1 , wherein the metal bonding layer has a melting point of 350° C. or more.
3. The device of claim 1 , wherein the metal bonding layer is formed of a metal selected from a group consisting of Au, Al, Ag, Pd, Pt, Rh, Ru, Cu, Mo, and Ni.
4. The device of claim 1 , wherein the conductive substrate is one selected from an Si-Al alloy substrate, and SiC substrate, and a GaAs substrate.
5. The device of claim 1 , wherein the conductive substrate is metal substrate comprising at least one selected from a group consisting of W, Cu, Au, Ni, and Ti.
6. The device of claim 1 , wherein the conductive substrate has a thermal conductivity of 100 W/m or more.
7. The device of claim 1 , wherein the reflective metal layer comprises a metal selected from a group consisting of Al, Ag, Ni, Ph, Pd, Pt, Ru, Au, and a composition thereof.
8. The device of claim 1 , wherein the diffusion barrier metal layer comprises a metal selected from a group consisting of Ti, W, Mo, Co, Pd, Pt, Ni, and a composition thereof.