Light emitting device having a plurality of light emitting cells and method of fabricating the same
View Patent ↗Disclosed is a light emitting device having a plurality of light emitting cells. The light emitting device comprises a thermally conductive substrate, such as a SiC substrate, having a thermal conductivity higher than that of a sapphire substrate. The plurality of light emitting cells are connected in series on the thermally conductive substrate. Meanwhile, a semi-insulating buffer layer is interposed between the thermally conductive substrate and the light emitting cells. For example, the semi-insulating buffer layer may be formed of AlN or semi-insulating GaN. Since the thermally conductive substrate having a thermal conductivity higher than that of a sapphire substrate is employed, heat-dissipating performance can be enhanced as compared with a conventional sapphire substrate, thereby increasing the maximum light output of a light emitting device that is driven under a high voltage AC power source. In addition, since the semi-insulating buffer layer is employed, it is possible to prevent an increase in a leakage current through the thermally conductive substrate and between the light emitting cells.
1. A light emitting device having a plurality of light emitting cells, comprising:
a thermally conductive substrate having a thermal conductivity higher than that of a sapphire substrate;
a plurality of light emitting cells serially connected to one another on the thermally conductive substrate; and
a semi-insulating buffer layer interposed between the thermally conductive substrate and the light emitting cells,
wherein the thermally conductive substrate comprises AlN or an N-type SiC substrate, and
wherein the semi-insulating buffer layer is partially doped with an acceptor.
2. The device of claim 1 , wherein the semi-insulating buffer layer is formed of AlN.
3. The device of claim 1 , wherein the semi-insulating buffer layer is formed of semi-insulating GaN.
4. The device of claim 3 , wherein the semi-insulating GaN is GaN doped with the acceptor.
5. The device of claim 1 , wherein each of the light emitting cells comprises an N-type semiconductor layer, an active layer, and a P-type semi-conductor layer, and the N-type semiconductor layer and the P-type semi-conductor layer of adjacent light emitting cells are electrically connected in series by means of metallic wiring.
6. The device of claim 1 , wherein the semi-insulating buffer layer is continuously disposed between each of the light emitting cells.
7. A method of fabricating a light emitting device, comprising:
forming a thermally conductive substrate comprising AlN or an N-type SiC substrate;
forming a semi-insulating buffer layer on the thermally conductive substrate;
forming an N-type semiconductor layer, an active layer, and a P-type semi-conductor layer on the semi-insulating buffer layer;
patterning the P-type semiconductor layer, the active layer, and the N-type semi-conductor layer to form a plurality of light emitting cells, each of the light emitting cells having a partially exposed N-type semiconductor layer; and
forming metallic wiring serially connecting the light emitting cells in such a way that the N-type semiconductor layer of each of the light emitting cells is connected to the P-type semiconductor layer of a light emitting cell adjacent thereto, and
wherein forming the semi-insulating buffer layer comprises doping an acceptor to a partial thickness of the semi-insulating buffer layer.
8. The method of claim 7 , wherein the semi-insulating buffer layer is formed of AlN.
9. The method of claim 7 , wherein the semi-insulating buffer layer is formed of semi-insulating GaN.
10. The method of claim 9 , wherein the semi-insulating GaN is GaN doped with the acceptor.
11. The method of claim 10 , wherein the acceptor is doped using an ion implantation technique.