Method for manufacturing semiconductor device
View Patent ↗A method for manufacturing semiconductor device includes the following steps. First, a carrier substrate and a plurality of pieced segments of wafer are provided. Each of the pieced segments of wafer has an active surface and a back surface on opposite sides thereof. Further, there is at least a bonding pad disposed on the active surface. Next, an adhering layer is formed between the carrier substrate and the active surfaces of the pieced segments of wafer, so as to make the pieced segments of wafer adhere to the carrier substrate. Next, a through silicon via is formed in each of the pieced segments of wafer to electrically connect to the bonding pad correspondingly. Then, the pieced segments of wafer are separated from the carrier substrate.
1. A method for manufacturing a semiconductor device, the method comprising:
forming an adhering layer between a carrier substrate and a first pieced segment of wafer and a second pieced segment of wafer, respectively, wherein the first pieced segment of wafer includes a first active surface, a first back surface opposite the first active surface, and a first bonding pad positioned on the first active surface, wherein the second pieced segment of wafer includes a second active surface, a second back surface opposite the second active surface, and a second bonding pad positioned on the second active surface, and wherein the adhering layer is patterned such that the adhering layer covers less than an entirety of the first active surface or the second active surface;
forming a via in the first pieced segment of wafer, wherein the via is electrically connected to the first bonding pad; and
separating the first pieced segment of wafer and the second pieced segment of wafer from the carrier substrate.
2. The method of claim 1 , wherein the first pieced segment of wafer comprises a semiconductor element disposed in the active surface, and wherein the adhering layer is patterned such that the adhering layer is not in contact with the semiconductor element.
3. The method of claim 2 , wherein the semiconductor element comprises a micro lens array or a color filter array.
4. The method of claim 2 , wherein the adhering layer does not contact the semiconductor element.
5. The method of claim 1 , further comprising cutting the first pieced segment of wafer to create additional chips after said separating the first pieced segment of wafer and the second pieced segment of wafer from the carrier substrate.
6. The method of claim 1 , wherein said separating the first pieced segment of wafer and the second pieced segment of wafer from the carrier substrate comprises at least one of irradiating the adhering layer by ultraviolet light, hot melting the adhering layer, mechanically stripping the adhering layer, or dissolving the adhering layer with a solvent.
7. The method of claim 1 , wherein said forming a via comprises:
forming a through hole in the first pieced segment of wafer;
forming a dielectric layer on the first back surface of the first pieced segment of wafer and within the through hole;
removing a portion of the dielectric layer in the through hole to expose the first bonding pad; and
depositing a metallic layer into the through hole to form the via, wherein the metallic layer is electrically connected to the first bonding pad.
8. The method of claim 1 , wherein the wafer of the first pieced segment of wafer comprises a usable region and an undesirable region, the method further comprising cutting the wafer along an edge between the usable region and the undesirable region to obtain the first pieced segment of wafer.
9. The method of claim 1 , wherein the carrier substrate is a transparent substrate.
10. The method of claim 1 , further comprising thinning the first pieced segment of wafer before said forming a via.
11. The method of claim 1 , wherein the wafer of the first pieced segment of wafer is a different wafer than the wafer of the second pieced segment of wafer.
12. The method of claim 1 , wherein the wafer of the first pieced segment of wafer is a same wafer as the wafer of the second pieced segment of wafer.
13. The method of claim 1 , wherein the adhering layer is formed on at least a portion of the first bonding pad and on at least a portion of the wafer.
14. The method of claim 1 , wherein said forming an adhering layer between a carrier substrate and a first pieced segment of wafer and a second pieced segment of wafer, respectively, comprises rearranging the first pieced segment of wafer and the second pieced segment of wafer on the carrier substrate in an arrangement corresponding to an existing process equipment.