Semiconductor device packaging structure and packaging method
View Patent ↗Exemplary semiconductor device packaging structure and packaging method are provided. The packaging method uses an adhesive layer to bond multiple wafer pieces onto a first surface of a carrier substrate, each adjacent two of the wafer pieces having a gap formed therebetween for exposing a part of the adhesive layer. A packaging layer is filled in each of the gaps. At least one through silicon via is formed each of the wafer pieces to expose a bonding pad formed on an active surface of the wafer pieces. Redistribution circuit layers are formed on back surfaces of the respective wafer pieces and filled into the through silicon vias for electrical connection with the bonding pads. A sawing process is performed to saw starting from each of the packaging layers to a second surface of the carrier substrate, and thereby multiple semiconductor device packaging structures are obtained.
1. A semiconductor device packaging method comprising:
providing a plurality of wafers;
performing an electrical test applied to each of the wafers to acquire a plurality of available regions of each of the wafers;
cutting the available regions down from the wafers, and thereby a plurality of wafer pieces are obtained, each of the wafer pieces having an active surface and a back surface, the active surface being opposite to the back surface and at least one bonding pad formed thereon;
providing at least one carrier substrate having a first surface and a second surface opposite to each other;
forming an adhesive layer on the first surface of the carrier substrate;
bonding the wafer pieces to the carrier substrate by contacting the active surfaces of the wafer pieces with the adhesive layer, wherein each adjacent two of the wafer pieces are separated with a gap therebetween and whereby a part of the adhesive layer is exposed;
filling a packaging layer into each of the gaps;
forming at least one through silicon via in each of the wafer pieces to expose the bonding pad;
forming a redistribution circuit layer on the back surface of each of the wafer pieces and filled into the through silicon via for electrical connection with the bonding pad; and
performing a sawing process to saw starting from each of the packaging layers to the second surface of the carrier substrate, and thereby a plurality of semiconductor device packaging structures are obtained.
2. The semiconductor device packaging method as claimed in claim 1 , before performing the sawing process, further comprising:
forming a protective layer on the back surfaces of the wafer pieces to cover the redistribution circuit layers, wherein the protective layer has a plurality of openings each exposing a part of each of the redistribution circuit layers; and
forming a plurality of solder balls filled into the openings for electrical connection with the respective redistribution circuit layers.
3. The semiconductor device packaging method as claimed in claim 1 , after forming the through silicon vias and before forming the redistribution circuit layers, further comprising:
forming a dielectric layer on the back surfaces of the wafer pieces, wherein the dielectric layer is filled into the through silicon vias; and
removing a part of the dielectric layer filled in the through silicon vias to expose the bonding pads.
4. The semiconductor device packaging method as claimed in claim 1 , before forming the through silicon vias, further comprising:
thinning the wafer pieces.
5. The semiconductor device packaging method as claimed in claim 1 , wherein a method for filling the packaging layers into the gaps comprises dispensing.
6. The semiconductor device packaging method as claimed in claim 5 , after filling the packaging layers into the gaps, further comprising:
performing a grinding and polishing process applied to the packaging layers, to remove a portion of each of the packaging layers protruding from the back surfaces of the wafer pieces.