Resistive memory and methods of processing resistive memory
View Patent ↗Resistive memory and methods of processing resistive memory are described herein. One or more method embodiments of processing resistive memory include forming a resistive memory cell material on an electrode having an access device contact, and forming a heater electrode on the resistive memory cell material after forming the resistive memory cell material on the electrode such that the heater electrode is self-aligned to the resistive memory cell material.
1. A method of processing a resistive memory cell, comprising:
forming a resistive memory cell material on an electrode having an access device contact; and
forming a heater electrode on a top surface of the resistive memory cell material after forming the resistive memory cell material on the electrode such that the heater electrode is self-aligned to the resistive memory cell material;
removing a portion of the heater electrode; and
removing only a portion of the top surface of the resistive memory cell material.
2. The method of claim 1 , wherein the method includes forming the resistive memory cell material on the electrode and the heater electrode on the resistive memory cell material in situ.
3. The method of claim 1 , wherein the method includes removing the portion of the heater electrode such that an area of the heater electrode in contact with the resistive memory ceil material is smaller than an area of the electrode in contact with the resistive memory cell material.
4. A method of processing a memory cell, comprising:
forming a cell material on an electrode having an access device contact in situ;
forming a heater electrode on a top surface of the cell material in situ after forming the cell material on the electrode;
removing a portion of the heater electrode and only a portion of the top surface of the resistive cell material; and
forming a first spacer on the cell material and adjacent a sidewall of the heater electrode such that the first spacer occupies a portion of an area previously occupied by the removed portion of the heater electrode and the removed portion of the cell material.
5. The method of claim 4 , wherein the method includes removing an additional portion of the cell material.
6. The method of claim 5 , wherein the method includes forming a second spacer on the cell material and adjacent a sidewall of the first spacer such that the second spacer occupies a portion of an area previously occupied by the removed additional portion of the cell material, wherein the second spacer is a different material than the first spacer.
7. The method of claim 4 , wherein the cell material is a phase change material.
8. The method of claim 4 , wherein the method includes forming a dielectric plug on the heater electrode.
9. The method of claim 4 , wherein the method includes: forming a metal plug on the heater electrode; removing the metal plug after the first spacer is formed; and forming a dielectric in an area previously occupied by the removed metal plug.
10. The method of claim 4 , wherein the method includes forming the cell material and the heater electrode using a sputter deposition technique.