IP Library Granted Patent US 8,795,502
Granted Patent B2
US 8,795,502 · App. 12/778,689 · Granted Aug 5, 2014

Electrodeposition under illumination without electrical contacts

Inventors: John M. Cotte (New Fairfield, CT); Harold J. Hovel (Katonah, NY); Devendra K. Sadana (Pleasantville, NY); Xiaoyan Shao (Yorktown Heights, NY); Steven Erik Steen (Peekskill, NH)
Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 8,795,502
App. No.
12/778,689
Granted
Aug 5, 2014
Kind
B2
Abstract

A method of forming patterned metallization by electrodeposition under illumination without external voltage supply on a photovoltaic structure or on n-type region of a transistor/junction.

Claims (37)

1. A method of forming patterned metallization by electrodeposition under illumination on a photovoltaic structure, comprising:

providing a primary and a secondary tank, wherein the primary tank is for a metal deposition reaction and the second tank is for a coupling oxidation reaction;

introducing a metal plating solution into the primary and secondary tank, wherein the secondary tank solution comprises chemical ions with reversible redox reactions;

immersing a photovoltaic structure into the metal plating solution of the primary tank;

electrically connecting the backside of the photovoltaic structure to the metal plating solution in the secondary tank with external electrical connection wires;

illuminating the frontside of the photovoltaic structure; and

electrodepositing a metal pattern on the photovoltaic structure to form the patterned metallization.

2. The method according to claim 1 , wherein the metal plating solution in the primary and secondary tanks comprises copper (Cu), cobalt (Co), and/or nickel (Ni).

3. The method according to claim 2 , wherein the metal plating solution in the secondary tank comprises a lower chemical concentration than the metal plating solution in the primary tank, without any additives.

4. The method according to claim 1 , wherein the pattern is a (Cu) copper (Cu), cobalt (Co), and/or nickel (Ni) grid pattern.

5. The method according to claim 1 , wherein Cu is used as a counter electrode (CE), and the backside of the photovoltaic structure is electrically connected to the metal plating solution in the secondary tank with electrical connection wires comprising Cu (copper).

6. The method according to claim 1 , wherein metal is selectively deposited on a n-Si region of a transistor or junction of the photovoltaic structure.

7. The method according to claim 1 , wherein the metal is selected from the group consisting of Cu, Ag, Co, Cr, Zn, Ni, Pd, and Pt.

8. The method according to claim 1 , wherein the structure is a solar cell.

9. The method according to claim 8 , wherein the a solar cell comprises a n-Si emitter layer on top of a p-Si base.

10. The method according to claim 9 , wherein an passivation layer and antireflection layer with grid pattern are deposited on the frontside (n-emitter) surface.

11. The method according to claim 9 , wherein spin on insulating and transparent dielectric are used to build a higher aspect ratio grid structure.

12. A method of forming patterned metallization by electrodeposition under illumination on a photovoltaic structure, comprising:

providing a primary and a secondary tank, wherein the primary tank is for a metal deposition reaction and the second tank is for a coupling oxidation reaction;

introducing a metal plating solution into the primary and secondary tank, wherein the secondary tank solution comprises chemical ions with reversible redox reactions and wherein the metal plating solution introduced into the secondary tank comprises a lower chemical concentration than the metal plating solution introduced into the primary tank;

immersing a photovoltaic structure into the metal plating solution of the primary tank, wherein the photovoltaic structure comprises a n-Si emitter layer on top of a p-Si base that is coated with a conductive layer;

electrically connecting the backside of the photovoltaic structure to the metal plating solution in the secondary tank with external electrical connection wires;

illuminating the frontside of the photovoltaic structure; and

electrodepositing metal grid pattern on the photovoltaic structure to form the patterned metallization, without use of an external voltage supply.

13. The method of claim 12 , wherein the conductive layer on the p-Si base is about 5 to about 50 microns thick and comprises (Al) aluminum and/or (Ag) silver.

14. The method of claim 13 , wherein the n-Si emitter layer is textured to minimize reflection.

15. The method of claim 13 , wherein the n-Si emitter layer is treated with a passivation layer and an antireflection layer to improve device performance.

16. The method of claim 15 , wherein the passivation layer is thermal SiO 2 and an antireflection layer comprises nitride, nitride/oxide, TiO2, and/or MgF 2 .

17. The method of claim 12 , further comprising measuring the current/charge passed between the primary tank and the secondary tank during deposition with an amp meter configured to measure the current/charge passed between the primary tank and the secondary tank during deposition.

18. The method of claim 12 , wherein the photovoltaic structure further comprises a spin on insulating and transparent dielectric to build a higher aspect ratio.

19. A method of forming patterned metallization by electrodeposition under illumination on a photovoltaic structure, comprising:

providing a primary and a secondary tank, wherein the primary tank is for a metal deposition reaction and the second tank is for a coupling oxidation reaction;

introducing a (Cu) metal plating solution into the primary and secondary tank, wherein the secondary tank solution comprises chemical ions with reversible redox reactions and wherein the (Cu) metal plating solution introduced into the secondary tank comprises a lower chemical concentration than the (Cu) metal plating solution introduced into the primary tank;

immersing a photovoltaic structure into the (Cu) copper metal plating solution of the primary tank, wherein the photovoltaic structure comprises a n-Si emitter layer on top of a p-Si base, wherein the n-Si emitter layer is textured to minimize reflection and has been treated with a passivation layer and an antireflection layer, and the p-Si base is coated with a conductive layer having a thickens of about 5 to about 50 microns and comprises (Al) aluminum and/or (Ag) silver;

electrically connecting the backside of the photovoltaic structure to the metal plating solution in the secondary tank with external electrical connection wires;

illuminating the frontside of the photovoltaic structure; and

electrodepositing (Cu) copper metal grid pattern on the photovoltaic structure to form the patterned metallization, without use of an external voltage supply.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 20, 2010
From: COTTE, JOHN M.; HOVEL, HAROLD J.; SADANA, DEVENDRA K.; SHAO, XIAOYAN; STEEN, STEVEN E.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 024414/0656 →
Continuity (1)
Related Publication 20110278172A1 · Nov 17, 2011