IP Library › Granted Patent US 8,203,144
Granted Patent B2
US 8,203,144 · App. 12/779,348 · Granted Jun 19, 2012

Semiconductor device having a metal oxide channel

Assignee: Hewlett-Packard Development Company, L.P.
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Quick Facts
Patent No.
US 8,203,144
App. No.
12/779,348
Granted
Jun 19, 2012
Kind
B2
Abstract

A semiconductor device includes a metal oxide channel and methods for forming the same. The metal oxide channel includes indium, gallium, and zinc.

Claims (17)

1. A semiconductor device, comprising:

a drain electrode;

a source electrode;

a channel contacting the drain electrode and the source electrode, wherein the channel includes a metal oxide having one or more compounds of formula A x B x C x D x O x wherein A is In, B is Ga, C is Zn, D is Cd, O is atomic oxygen, and wherein each x is independently a non-zero integer;

a gate electrode; and

a gate dielectric positioned between the gate electrode and the channel.

2. The semiconductor device of claim 1 , wherein the channel includes one of an amorphous form, a single-phase crystalline form, and a mixed-phase crystalline form.

3. The semiconductor device of claim 1 , wherein the one or more compounds of the formula A x B x C x D x O x includes an atomic composition of ratio A:B:C:D, wherein A, B, C, and D are each in a range of about 0.017 to about 0.95.

4. The semiconductor device of claim 1 , wherein the metal oxide includes one or more metal oxides including indium, gallium, zinc, and cadmium.

5. A semiconductor device, comprising:

a drain electrode;

a source electrode;

a channel to electrically couple the drain electrode and the source electrode, wherein the channel includes an indium-gallium-zinc metal oxide formed from a precursor composition that includes indium, gallium, and zinc oxides, wherein the formed indium-gallium-zinc metal oxide is in an amorphous form; and

a gate electrode separated from the channel by a gate dielectric.

6. The semiconductor device of claim 5 , wherein the source, drain, and gate electrodes include a substantially transparent material.

7. The semiconductor device of claim 5 , wherein the channel is deposited with an ink-jet deposition technique.

8. The semiconductor device of claim 5 , including a substrate or substrate assembly upon which the semiconductor device is formed.

Continuity (2)
Continuation 11870618 · Oct 11, 2007
Related Publication 20100219411A1 · Sep 2, 2010