Strapping contact for charge protection
View Patent ↗A semiconductor device includes a substrate and a memory cell formed on the substrate. The memory cell includes a word line. The semiconductor device also includes a protection area formed in the substrate, a conductive structure configured to extend the word line to the protection area, and a contact configured to short the word line and the protection area.
1. A method of forming a semiconductor device including a substrate, the method comprising:
forming a memory cell on the substrate, where the memory cell includes a word line;
forming a polysilicon structure connected to the word line;
forming a charge protection structure in the substrate; and
forming a strapping contact over and contacting a portion of a top surface of the polysilicon structure and abutting an end surface of the polysilicon structure, where the strapping contact shorts the word line and the charge protection structure.
2. The method of claim 1 , where forming the charge protection structure comprises forming a low voltage N well.
3. The method of claim 1 , where forming the charge protection structure includes forming:
an N-well formed in the substrate,
a heavily doped p-type region formed in the N-well, and
a heavily doped n-type region formed in the N-well and the substrate.
4. The method of claim 3 , where forming the strapping contact comprises forming the strapping contact to directly connect to the polysilicon structure and the heavily doped p-type region.
5. The method of claim 1 , where forming the strapping contact comprises forming a plurality of contacts, forming the memory cell comprises forming a plurality of word lines, and forming the polysilicon structure comprises forming a single conductive structure via which each of the plurality of contacts connects to a corresponding one of the word lines.
6. The method of claim 1 , where forming the strapping contact comprises forming the strapping contact at a height of from about 500 to about 5,000 Å on the charge protection structure.
7. The method of claim 1 , where forming the strapping contact comprises forming a strapping contact at a width of from about 300 to about 3,000 Å.
8. The method of claim 1 , further comprising forming a metal-1 layer below the polysilicon structure.
9. The semiconductor device of claim 1 , where the strapping contact protects the memory cell from in-line charging.
10. A method comprising:
forming a substrate;
forming a memory cell formed on the substrate, the memory cell including a word line;
forming a protection area in the substrate;
forming a conductive structure extending from the word line to the protection area; and
forming a contact as an abutment contacting two different surfaces of the conductive structure, where the contact provides shorting of the word line and the protection area.
11. The method of claim 10 , where forming the protection area comprises forming a diode structure.
12. The method of claim 11 , where forming the diode structure comprises:
forming an N-well formed in the substrate,
forming a heavily doped p-type region in the N-well, and
forming a heavily doped n-type region in the N-well and the substrate.
13. The method of claim 12 , where forming the contact comprises connecting the conductive structure and the heavily doped p-type region.
14. The method of claim 10 , where forming the diode structure comprises:
forming a P-well in the substrate,
forming a heavily doped n-type region in the P-well, and
forming a heavily doped p-type region in the P-well and the substrate.
15. The method of claim 14 , where forming the contact comprises directly connecting the conductive structure and the heavily doped n-type region.
16. The method of claim 10 , further comprising forming a metal-1 layer below the conductive structure.
17. The method of claim 10 , where the contact protects the memory cell from in-line charging.
18. The method of claim 10 , where the two different surfaces are substantially perpendicular to each other.
19. The method of claim 10 , where the contact contacts less than an entire surface area of one of the two different surfaces of the conductive structure and the contact contacts substantially an entire surface area of the other of the two different surfaces of the conductive structure.
20. The method of claim 10 , where the contact contacts substantially an entire surface area of the end surface.