Apparatus and method for the production of trisilylamine

1. A tubular laminar flow plug flow gas reactor for synthesis of silylamines comprising: (a) a first portion of the tubular laminar flow reactor defining a gas entry zone, a second portion of the tubular laminar flow reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region; (b) one or more first conduits positioned substantially parallel to the central, longitudinal axis of the flow reactor extending into the gas entry zone and terminating in the reaction zone, the one or more conduits directing a laminar flow of a first reactant gas into the reaction zone; (c) one or more second gas entry conduits positioned upstream of the one or more first conduits directing a flow of a second reactant gas into the gas entry zone to form a flow of the second reactant gas which passes into the reaction zone; (d) the reaction zone wherein the first reactant gas and the second reactant gas come in contact with one another forming a reactant stream; (e) a filter positioned at the downstream end of the reaction zone; (f) a gas exit port directing the flow of the reactant stream from the reaction zone to a first collection zone; (g) the first collection zone comprising a first collector removing reaction product from the reactant stream.

2. The reactor of claim 1 wherein the reaction zone is cylindrical.

3. The reactor of claim 1 further comprising a second collection zone for removing products from the effluent stream of the first collector.

4. The reactor of claim 1 wherein the tubular flow reactor is positioned at an angle to horizontal from about 0 degrees to about 90 degrees.

5. The reactor of claim 4 wherein the tubular flow reactor is positioned at an angle to horizontal of about 85 degrees to about 90 degrees.

6. The reactor of claim 4 wherein the tubular flow reactor is positioned vertical.

7. The reactor of claim 1 further comprising a load lock gate valve upstream of the gas entry zone.

8. The reactor of claim 7 further comprising a solids accumulator upstream of the load lock gate valve.

9. The reactor of claim 1 wherein the first collector is a condensation trap having a temperature of about 20 deg C. to about −110 deg C. for removing silylamines from the reactant stream.

10. The reactor of claim 1 wherein the first collector is a condensation trap having a temperature of about −50 deg C. to about −110 deg C. for removing silylamines from the reactant stream.

11. The reactor of claim 1 wherein the reactor is heated.

12. The reactor of claim 3 wherein the second collection zone is a condensation trap having a temperature colder than about −140 deg C. for condensing waste products from the effluent stream of the first collector.

13. The reactor of claim 1 wherein the reaction zone is lined with glass.

14. The reactor of claim 1 wherein the reaction zone is lined with a non-stick material.

15. The reactor of claim 14 wherein the non-stick material is a fluoropolymer.

16. The reactor of claim 1 wherein the one first and one second conduits comprise concentric tubes wherein the second reactant gas flows in the outer concentric tube and the first reactant gas flows in the center tube.

17. The reactor of claim 1 wherein a plurality of first conduits is positioned substantially along the central, longitudinal axis of the flow reactor extending into the reactor and terminating in the reaction zone where each of the conduits is located sequentially down stream of each successive conduit, each of the plurality of conduits directing a flow of the first reactant gas into the reaction zone.

18. The reactor of claim 16 wherein the first reactant gas flows in the outer tube and the second reactant gas flows in the center tube of the concentric tubes.

19. A tubular laminar flow plug flow gas reactor for synthesis of trisilylamine comprising: (a) a first portion of the tubular laminar flow reactor defining a gas entry zone, a second portion of the tubular laminar flow reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region; (b) one or more conduits positioned substantially parallel to the central, longitudinal axis of the flow reactor extending into the gas entry zone and terminating in the reaction zone, the one or more conduits directing a laminar flow of a first reactant gas into the reaction zone; (c) one or more gas entry conduits positioned upstream of the one or more conduits directing a flow of a second reactant gas into the gas entry zone to form a flow of the second reactant gas which passes into the reaction zone; (d) the reaction zone wherein the first reactant gas and the second reactant gas come in contact with one another forming a reactant stream; (e) a filter positioned at the downstream end of the reaction zone; (f) a gas exit port directing the flow of the reactant stream from the reaction zone to a first collection zone; (g) the first collection zone comprising a first collector removing reaction product from the reactant stream; and wherein the internal reactor pressure is maintained at less than one atmosphere and the first reactant gas is ammonia and the second reactant gas is monochlorosilane.

20. The reactor of claim 19 further wherein a plurality of first conduits is positioned substantially along the central, longitudinal axis of the flow reactor extending into the reactor and terminating in the reaction zone where each of the conduits is located sequentially down stream of each successive conduit, the plurality of conduits directing a flow of the first reactant gas into the reaction zone.

21. The reactor of claim 19 further comprising a load lock gate valve upstream of the gas entry zone.

22. The reactor of claim 21 further comprising a solids accumulator upstream of the load lock gate valve.

23. The reactor of claim 19 wherein the first collector is a condensation trap having a temperature of 20 deg C. to about −110 deg C. for removing silylamines from the reactant stream.

24. The reactor of claim 19 wherein the first collector is a condensation trap having a temperature of −50 deg C. to about −110 deg C. for removing silylamines from the reactant stream.

25. The reactor of claim 19 wherein the reactor is heated.

26. The reactor of claim 19 wherein the reaction zone is cylindrical.

27. The reactor of claim 19 further comprising a second collector for removing waste products from the effluent stream of the first collector.

28. The reactor of claim 27 wherein the second collector is a condensation trap having a temperature colder than about −140 deg C. for condensing silane.

29. The reactor of claim 19 wherein the reaction zone is lined with glass.

30. The reactor of claim 19 wherein the reaction zone is lined with a non-stick material.