Method for manufacturing semiconductor device
A method of manufacturing a semiconductor device includes forming a gate electrode, a source region and a drain region, forming a first metal layer, forming silicide layers by first annealing, removing a remainder of the first metal layer after the first annealing, performing a second annealing, forming a second metal layer, performing a third annealing, and removing a remainder of the second metal layer.
1. A method of manufacturing a semiconductor device, comprising:
forming a gate electrode including silicon over a semiconductor substrate;
forming a source region and a drain region in the semiconductor substrate;
forming a first metal layer over the gate electrode, the source region and the drain region;
forming silicide layers respectively in the gate electrode, the source region and the drain region by performing first annealing to heat the first metal layer;
removing a remainder of the first metal layer after the first annealing;
performing a second annealing after removing the first metal layer;
forming a second metal layer to cover the gate electrode, the source region and the drain region after the second annealing;
performing a third annealing to heat the second metal layer; and
removing a remainder of the second metal layer after the third annealing.
2. The method according to claim 1 , wherein the second annealing is performed by flash lamp annealing or laser annealing.
3. The method according to claim 2 , wherein the flash lamp annealing is performed at an irradiation energy in the range of 24 J/cm 2 to 28 J/cm 2 at an assist temperature of in the range of 300° C. to 450° C. for an irradiation time in the range of 0.5 ms to 1.5 ms.
4. The method according to claim 2 , wherein the laser annealing is performed at a temperature in the range of 700° C. to 1000° C.
5. The method according to claim 1 , wherein the third annealing is performed at a temperature in the range of 200° C. to 450° C.
6. The method according to claim 1 , further comprising performing a fourth annealing after removing the remainder of the second metal layer.
7. The method according to claim 6 , wherein the fourth annealing is performed by flash lamp annealing or laser annealing.
8. The method according to claim 1 , wherein the first metal layer includes Ni or a Ni alloy.
9. The method according to claim 1 , wherein the second metal layer includes Ni or a Ni alloy.
10. The method according to claim 8 , wherein the Ni alloy includes at least one element selected from the group consisting of Pt, Ta, W, Re, Y, Yb, La, Al, and Ti.
11. The method according to claim 10 , wherein the Ni alloy includes at least one element at a concentration in the range of 2 at. % to 10 at. % each.