Oxide based memory
View Patent ↗Methods, devices, and systems associated with oxide based memory are described herein. In one or more embodiments, a method of forming an oxide based memory cell includes forming a first electrode, forming a tunnel barrier, wherein a first portion of the tunnel barrier includes a first material and a second portion of the tunnel barrier includes a second material, forming an oxygen source, and forming a second electrode.
1. A method of foaming an oxide based memory cell, comprising:
forming a first electrode;
forming an oxygen source, wherein a first number of oxygen ions are present in the oxygen source;
forming a tunnel barrier, wherein a first portion of the tunnel barrier includes a first material that is adjacent to the first electrode and a second portion of the tunnel barrier includes a second material that is adjacent to the oxygen source, wherein an activation energy for oxygen ion diffusion of the first material is higher than an activation energy for oxygen ion diffusion of the second material, and wherein a second number of oxygen ions from the oxygen source are present in the first and second portions of the tunnel barrier;
and forming a second electrode.
2. The method of claim 1 , wherein the first material is aluminum oxide and the second material is hafnium oxide.
3. The method of claim 1 , wherein forming the tunnel barrier and the oxygen source includes forming the tunnel barrier and the oxygen source using atomic layer deposition (ALD).
4. The method of claim 1 , wherein forming the tunnel barrier and the oxygen source includes forming the tunnel barrier and the oxygen source using chemical vapor deposition (CVD).
5. The method of claim 1 , wherein the second material has an activation energy for oxygen ion diffusion that is lower than an activation energy for oxygen ion diffusion of the first material.
6. A method of forming an oxide based memory cell, comprising:
forming a first electrode;
forming an oxygen source, wherein a first number of oxygen ions are present in the oxygen source;
forming a tunnel barrier, wherein the tunnel barrier includes a first material adjacent to the first electrode with a first activation energy for oxygen ion diffusion and a second material adjacent to the oxygen source with a second activation energy for oxygen ion diffusion, wherein the first activation energy for oxygen ion diffusion is higher than the second activation energy for oxygen ion diffusion, and wherein a second number of oxygen ions from the oxygen source are present in the first and second materials of the tunnel barrier;
and forming a second electrode.
7. The method of claim 6 , wherein the first activation energy for oxygen ion diffusion of the first material is greater than the second activation energy for oxygen ion diffusion of the second material.
8. The method of claim 6 , wherein the first material is aluminum oxide and the second material is hafnium oxide.
9. The method of claim 6 , wherein the first material is aluminum oxide and the second material is zirconium oxide.
10. The method of claim 6 , wherein forming the tunnel barrier includes forming the tunnel barrier with alternating portions of the first material and the second material.
11. A memory cell, comprising:
a first electrode;
an oxygen source, wherein the oxygen source includes a first number of oxygen ions;
a tunnel barrier, wherein the tunnel barrier includes a second number of oxygen ions that originated from the oxygen source, wherein a first portion of the tunnel barrier is adjacent to the first electrode and includes a first material, wherein a ˜ a second portion of the tunnel barrier is adjacent to the oxygen source and includes a second material, and wherein an activation energy for oxygen ion diffusion of the first material is higher than an activation energy for oxygen ion diffusion of the second material; and
wherein the second number of oxygen ions from the oxygen source are present in the first and second portions of the tunnel barrier; and
a second electrode.
12. The memory cell of claim 11 , wherein the first material is aluminum oxide and the second material is hafnium oxide.
13. The memory cell of claim 11 , wherein the first material is aluminum oxide and the second material is zirconium oxide.
14. The memory cell of claim 11 , wherein a third portion of the tunnel barrier includes the first material and a fourth portion the tunnel barrier includes the second material.
15. The memory cell of claim 11 , wherein the first portion, the second portion, the third portion, and the fourth portion each are approximately 25% of the tunnel barrier.
16. The memory cell of claim 11 , wherein the oxygen source is perovskite metal oxide (PCMO).
17. A memory device, comprising:
an array of memory cells; and
circuitry for control and/or access of the array;
wherein at least one memory cell of the array includes:
a first electrode;
an oxygen source, wherein the oxygen source includes a first number of oxygen ions;
a tunnel barrier, wherein the tunnel barrier includes a second number of oxygen ions that originated from the oxygen source, wherein a first portion of the tunnel barrier is adjacent to the first electrode and includes a first material, wherein a second portion of the tunnel barrier is adjacent to the oxygen source and includes a second material ˜ and wherein an activation energy for oxygen ion diffusion of the first material is higher than an activation energy for oxygen ion diffusion of the second material; and
wherein the second number of oxygen ions from the oxygen source are present in the first and second portions of the tunnel barrier; and
a second electrode.
18. The memory device of claim 17 , wherein oxygen ions move from the oxygen source to the tunnel barrier when the first electrode is biased positively.
19. The memory device of claim 18 , wherein oxygen ions are trapped in the tunnel barrier after the first electrode is biased positively and a voltage potential is no longer present in the memory cell.
20. The memory device of claim 17 , wherein oxygen ions move from the tunnel barrier to the oxygen source when the first electrode is biased negatively.