Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices
View Patent ↗Microelectronic devices and method of forming a plurality of microelectronic devices on a semiconductor workpiece are disclosed herein. One such method includes placing a plurality of first interconnect elements on a side of a semiconductor workpiece, forming a layer on the side of the workpiece, reshaping the first interconnect elements by heating the first interconnect elements, and coupling a first portion of a plurality of individual second interconnect elements to corresponding first interconnect elements with a second portion of the individual second interconnect elements exposed.
1. A semiconductor workpiece, comprising:
a substrate;
a plurality of dies formed at the substrate, the individual dies including an integrated circuit and a plurality of terminals operably coupled to the integrated circuit;
a plurality of first conductive balls electrically coupled to corresponding terminals, the individual first conductive balls having a proximal portion proximate to the substrate and a generally flat distal portion opposite the proximal portion, wherein the generally flat distal portion is formed without removing material from the conductive balls;
a protective layer having a first surface facing the substrate and a second surface opposite the first surface, wherein the distal portion of the individual first conductive balls projects from the second surface of the protective layer, wherein a diameter of the flat distal portions of the individual first conductive balls is smaller than a corresponding aperture in the second surface of the protective layer; and
a plurality of second conductive balls attached to corresponding first conductive balls, wherein the first conductive balls and the second conductive balls form a stacked structure.
2. The semiconductor workpiece of claim 1 wherein:
the terminals on the die comprise a plurality of first terminals;
the workpiece further comprises a redistribution structure on the substrate, the redistribution structure including a plurality of second terminals; and
the first conductive balls are attached to the second terminals.
3. The semiconductor workpiece of claim 1 wherein the first conductive balls are attached directly to corresponding terminals on the die.
4. The semiconductor workpiece of claim 1 wherein:
the substrate comprises a first side and a second side opposite the first side;
the first conductive balls are positioned at the first side of the substrate; and
the workpiece further comprises an alignment feature at the second side of the substrate.
5. The semiconductor workpiece of claim 1 , further comprising an alignment feature on and/or in the protective layer.
6. The semiconductor workpiece of claim 1 wherein the second conductive balls are exposed.
7. The semiconductor workpiece of claim 1 wherein the stacked structure comprises a proximal portion proximate to the substrate and a distal portion opposite the proximal portion, and wherein the distal portion of the stacked structure is exposed.
8. A microelectronic device, comprising:
a die including an integrated circuit and a plurality of terminals operably coupled to the integrated circuit and exposed on a surface of the die;
a plurality of first conductive balls electrically coupled to the terminals, wherein the first conductive balls have a generally flat surface opposite the terminals, and wherein the generally flat surface is formed with a press without removing material from the conductive balls;
a protective layer having a first surface facing the substrate and a second surface opposite the first surface, wherein the distal portion of the individual first conductive balls projects from the second surface of the protective layer, wherein a diameter of the flat distal portions of the individual first conductive balls is smaller than a corresponding aperture in the second surface of the protective layer; and
a plurality of second conductive balls, wherein individual second conductive balls are stacked upon the generally flat surface of individual first conductive balls to form a stacked structure.
9. The microelectronic device of claim 8 , further comprising a redistribution structure on the surface of the die including redistribution terminals exposed on a surface of the redistribution structure, wherein the plurality of first conductive balls are electrically coupled to the redistribution terminals.
10. The microelectronic device of claim 8 wherein the individual first conductive balls have a coating opposite their respective flat surfaces, and wherein the coating has a first surface tension and the first conductive balls have a second surface tension greater than the first surface tension.
11. The microelectronic device of claim 8 , further comprising a material formed on the die, wherein the material comprises a flowable compound.