IP Library Granted Patent US 7,862,983
Granted Patent B2
US 7,862,983 · App. 12/800,013 · Granted Jan 4, 2011

Process for preparing stable photoresist compositions

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Quick Facts
Patent No.
US 7,862,983
App. No.
12/800,013
Granted
Jan 4, 2011
Kind
B2
Abstract

A composition of matter consisting of a stable solution containing a polymer derived from a solution of a polymer containing trace metals, the derived method comprising the steps of: (a) providing a polymer solution containing a polymer, a first solvent and trace metals; (b) passing said polymer solution through an acidic cation ion exchange material to remove said trace metals therefrom and thereby forming a polymer solution containing free acid radicals; (c) precipitating said polymer from said polymer solution of step b by contacting with a second solvent wherein the polymer is substantially insoluble therein; (d) filtering said solution and said second solvent to thereby form a solid polymer cake; and (e) contacting said cake from step d with sufficient quantities of additional said second solvent in order to remove free acid radicals therefrom.

Claims (9)

1. A composition of matter derived from a method of making a stable polymer from a solution of a polymer containing trace metals, said method which consists of:

(a) providing a polymer solution containing a polymer, a first solvent and trace materials;

(b) passing said polymer solution through an acidic cation ion echange material to remove said trace metals thereform and thereby forming a polymer solution containing free acid radcials:

(c) precipitating said polymer from said polymer solution of step b by contacting with a second solvent wherein the polymer is substantially insoluble therein;

(d) filtering said solution and said second solvent to thereby form a solid polymer cake;

(e)contacting said cake from step d with sufficient quantities of additional said second solvent in order to remove free acid radicals thereform;

(f) adding a compatible photoresist solvent to said polymer cake from step e and mixing the two in order to dissolve said polymer in said photoresist solvent and thereby forming a photoresist solution; and

(g) removing any residual first and second solvents from said polymer to form a stable polymer.

2. A primary photoresist composition for patterning electronic circuitry based on the composition of matter of claim 1 .

Assignments (2)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →