Method for fabricating a shallow and narrow trench FET and related structures
View Patent ↗Disclosed is a method for fabricating a shallow and narrow trench field-effect transistor (trench FET). The method includes forming a trench within a semiconductor substrate of a first conductivity type, the trench including sidewalls and a bottom portion. The method further includes forming a substantially uniform gate dielectric in the trench, and forming a gate electrode within said trench and over said gate dielectric. The method also includes doping the semiconductor substrate to form a channel region of a second conductivity type after forming the trench. In one embodiment, the doping step is performed after forming the gate dielectric and after forming the gate electrode. In another embodiment, the doping step is performed after forming the gate dielectric, but prior to forming the gate electrode. Structures formed by the invention's method are also disclosed.
1. A trench field-effect transistor (trench FET) utilizing a trench situated within a semiconductor substrate of a first conductivity type,
said trench including first and second sidewalls and a bottom, an entirety of said first and second sidewalls tapering into a bottom portion which includes said bottom, wherein a bottom trench width measured from said first sidewall to said second sidewall across said bottom of said trench is less than or approximately equal to two-thirds (⅔) of an uppermost width between said first and second sidewalls, thereby substantially reducing gate to drain charge of said trench FET,
said bottom portion being surrounded by a bottom implanted region in a drift region, said bottom implanted region having a higher dopant concentration than said substrate,
said trench FET further comprising a substantially uniform gate dielectric formed in said trench, a gate electrode formed within said trench and over said gate dielectric, and said semiconductor substrate is doped to form a channel region of a second conductivity type,
a source region of said first conductivity type in said semiconductor substrate adjacent said trench,
wherein said source region has a depth of less than approximately 0.15 microns, and wherein a channel length of said trench FET is less than or approximately equal to 0.3 microns,
wherein said substantially uniform gate dielectric, said gate electrode and said semiconductor substrate have a coplanar top surface,
wherein a top surface of said source region is completely covered by a dielectric material separate from said gate dielectric.
2. The trench FET of claim 1 wherein said semiconductor substrate is doped by dopant implantation.
3. The trench FET of claim 1 , wherein said gate dielectric has a bottom thickness substantially equal to a sidewall thickness.
4. The trench FET of claim 1 , wherein said gate electrode comprises polysilicon.
5. The trench FET of claim 1 , wherein said bottom trench width is less than approximately 0.3 microns.