Method for manufacturing semiconductor device, semiconductor chip, and semiconductor wafer
A method for manufacturing a semiconductor device includes forming a semiconductor wafer including a plurality of interconnect layers, the semiconductor wafer including: a plurality of chip-composing portions; a dicing region separating the chip-composing portions from each other; and a plurality of inter-chip interconnects formed in the dicing region and electrically connecting adjacent ones of the chip-composing portions; and forming semiconductor chips by dicing the dicing region so as to divide the chip-composing portions, wherein each of the inter-chip interconnects has a width of an intermediate portion narrower than widths of connection end portions connected to the adjacent ones of the chip-composing portions.
1. A method for manufacturing a semiconductor device, comprising:
forming a semiconductor wafer comprising a plurality of interconnect layers, the semiconductor wafer including:
a plurality of chip-composing portions;
a dicing region separating the chip-composing portions from each other; and
a plurality of inter-chip interconnects formed in the dicing region and electrically connecting adjacent ones of the chip-composing portions; and
forming semiconductor chips by dicing the dicing region so as to divide the chip-composing portions,
wherein each of the inter-chip interconnects has a width of an intermediate portion narrower than widths of connection end portions connected to the adjacent ones of the chip-composing portions.
2. The method for manufacturing a semiconductor device according to claim 1 , further comprising:
applying source voltage to power lines of the chip-composing portions through the inter-chip interconnects, between the forming a semiconductor wafer and the forming semiconductor chips,
wherein each of the inter-chip interconnects connects the power lines of adjacent ones of the chip-composing portions sequentially with each other.
3. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the inter-chip interconnects are composed of aluminum.
4. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the inter-chip interconnects are formed in the second or deeper interconnect layer among the plurality of interconnect layers, counted from the most surficial interconnect layer.
5. The method for manufacturing a semiconductor device according to claim 1 ,
wherein a width of the intermediate portion of each of the inter-chip interconnects is narrower by 5 μm or more, as compared with a width of the connection ends portion where the inter-chip interconnect is connected to the chip-composing portions.
6. The method for manufacturing a semiconductor device according to claim 1 ,
wherein a width of the connection ends where each of the inter-chip interconnects is connected to the chip-composing portions is equal to or larger than 65 μm and equal to or smaller than 80 μm, and
a width of the intermediate portion of the inter-chip interconnect is equal to or larger than 40 μm and equal to or smaller than 60 μm.
7. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the intermediate portion of each of the inter-chip interconnects has a length of at least 30 μm, in a direction orthogonal to the longitudinal direction of the dicing region.
8. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the intermediate portion of each of the inter-chip interconnects is positioned at the center of a width of the dicing region.
9. The method for manufacturing a semiconductor device according to claim 1 ,
wherein, in the forming a semiconductor wafer, a dummy metal pattern composed of a plurality of dummy metals is formed in at least one of the interconnect layers over or below the inter-chip interconnects only in an area corresponded to a region where the inter-chip interconnects are arranged, and corresponded to a region therearound.