Semiconductor device and method of manufacturing semiconductor device
View Patent ↗The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
1. A method of manufacturing a semiconductor device comprising:
forming a plurality of fins made of a semiconductor material on an insulating layer;
forming a gate insulating film on side surfaces of the plurality of fins;
forming a gate electrode on the gate insulating film; and
forming a stress film in such a manner that a tensile stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a current flow direction of the NMOSFET and a compressive stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a current flow direction of the PMOSFET, the stress film being formed on side surfaces of the first fin, on side surfaces of the second fin and on side surfaces of the gate electrode, wherein the formation of the stress film comprises:
forming the stress film to fill a spacing between the plurality of fins which are adjacent to each other;
removing a first portion of the stress film in a region of the second fin, such that a second portion of the stress film remains on side surfaces of the second fin, the second portion of the stress film having a film thickness of less than ½ of a spacing between the second fins which are adjacent to each other.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein the side surface of the first fin and the side surface of the second fin are each a crystal plane with a (100) orientation.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein the side surface of the first fin is a crystal plane with a (100) orientation, the side surface of the second fin is a crystal plane with a (110) orientation.