Biaxial scanning mirror for image forming apparatus
View Patent ↗A biaxial scanning mirror for an image forming apparatus includes a first wafer, a second wafer, and a spacer. The first wafer includes a mirror unit, a rectangular rotating unit, a permanent magnet, and a magnetically permeable layer. The second wafer has at least two cores each surrounded by a planar coil applied with an AC current for switching magnetic polarization of the cores such that the cores are attracted to or repelled from the rotating unit alternatively, thereby driving the rotating unit to rotate.
1. A biaxial scanning mirror for an image forming apparatus, comprising:
a first wafer, comprising:
a mirror unit, rotating with respect to a first axis, for reflecting light beams;
a rectangular rotating unit, formed around the mirror unit and connected to the mirror unit by a first shaft along the first axis, for rotating the mirror unit around a second axis which is perpendicular to the first axis, wherein the rotating unit includes first and second elongated planar sections extending perpendicular to the second axis and third and fourth elongated planar sections extending parallel to the second axis, the first through fourth elongated planar sections surrounding the mirror unit;
a permanent magnet fixedly attached to each of the first and second elongated planar sections near a center thereof; and
a magnetically permeable layer formed on each of the first and second elongated planar sections of the rotating unit for extending magnetic field generated by the permanent magnet from the center of the first and second elongated planer sections to both ends thereof;
a second wafer having a plurality of cores, including at least two cores placed below two ends of the first elongated planar section of the rotating unit and at least two cores placed below two ends of the second elongated planar section of the rotating unit, each core being surrounded by a planar coil for receiving an AC current for switching magnetic polarization of the core, such that the cores are attracted to or repelled from the rotating unit alternatively, thereby driving the rotating unit to rotate with respect to the second axis; and
a spacer, formed between the second wafer and the first wafer, for separating the second wafer and the first wafer.
2. The biaxial scanning mirror according to claim 1 , wherein the magnetically permeable layer comprises iron (Fe), nickel (Ni), zinc (Zn), manganese (Mn), or magnesium (Mg).
3. The biaxial scanning mirror according to claim 1 , further comprising a comb drive actuator for driving the mirror unit.
4. The biaxial scanning mirror according to claim 1 , wherein the mirror unit is actuated by rotation of the rotating unit around the second axis.
5. The biaxial scanning mirror according to claim 1 , wherein resonant frequency of the mirror unit around the first axis is higher than that of the rotating unit around the second axis.
6. The biaxial scanning mirror according to claim 1 , wherein the cores are perpendicular to the first wafer and the second wafer.
7. The biaxial scanning mirror according to claim 1 , wherein the planar coils are formed by Micro-Electro-Mechanical Systems (MEMS) process.
8. The biaxial scanning mirror according to claim 1 , further comprising a stopper formed on the second wafer for preventing the permanent magnet from impacting the second wafer.
9. The biaxial scanning mirror according to claim 1 , wherein the rotating unit is applied with a signal having a waveform of saw-tooth with a frequency of 60 Hz.
10. The biaxial scanning mirror according to claim 1 , wherein the mirror unit is applied with a sinusoidal signal with a frequency larger than 18 KHz.
11. The biaxial scanning mirror according to claim 1 , wherein the mirror unit is electrostatically triggered and the rotating unit is magnetically triggered.
12. The biaxial scanning mirror according to claim 1 , wherein the mirror unit and the rotating unit are both magnetically triggered.
13. The biaxial scanning mirror according to claim 1 , wherein each permanent magnet has two magnetic poles respectively facing the two cores placed below the two ends of the corresponding first or second elongated planar sections.