Optical element
An optical element embodied as a front surface mirror or as a lens wherein the optical element has at least one partial region composed of a material which has the property that the material is cooled upon irradiation with suitable excitation light.
1 . An optical element, comprising:
at least one partial region composed of a material which has the property that the material is cooled upon irradiation with suitable excitation light,
wherein the optical element is an optical element of an objective and a front surface mirror or a lens.
2 . An optical element, comprising:
at least one partial region composed of a material which has the property that the material is cooled upon irradiation with suitable excitation light,
wherein the optical element is a front surface mirror or a lens of a beam guiding system of a microlithography projection exposure apparatus.
3 . The optical element of claim 1 , wherein the material is a glass doped with rare earths or a crystal doped with rare earths.
4 . The optical element of claim 1 , wherein the material is selected from the group consisting of ZBLANP:Yb 3+ , ZBLAN:Yb 3 CNBZn:Yb 3+ , BIG:Yb 3+ , KGd(WO 4 ):Yb 3+ , KY(WO 4 ) 2 ;Yb 3+ , YAG:Yb 3+ , Y 2 SiO 5 :Yb 3+ , KPb 2 Cl 5 :Yb 3+ , BaY 2 F 8 :Yb 3+ , ZBLANP:Tm 3+ , BaY 2 F 8 :Tm 3+ , CNBZn:Er 3+ , KPb 2 Cl 5 :Er 3+ .
5 . The optical element of claim 3 , wherein the magnitude of the doping with rare earths is location-dependent.
6 . The optical element of claim 1 , wherein the optical element has a reflective coating for the excitation light, said reflective coating being configured in such a way that the excitation light is reflected back at the reflective coating into the partial region.
7 . The optical element of claim 6 , wherein the optical element has a side surface and the side surface has at least in part the reflective coating for the excitation light.
8 . The optical element of claim 7 , wherein the side surface is configured in such a way that the excitation light is reflected at least twice at the reflective coating.
9 . The optical element as claimed in claim 7 , wherein the partial region has the form of a cylinder, the side surface of which coincides with the side surface of the optical element.
10 . The optical element of claim 9 , wherein the side surface of the cylinder apart from an entrance location of the excitation light has the reflective coating.
11 . An optical system, comprising:
the optical element of claim 1 ,
wherein the optical system has at least one device which guides the excitation light into the partial region.
12 . The optical system of claim 11 , wherein the at least one device is configured in such a way that the excitation light has a predetermined angular spectrum upon entrance into the optical element.
13 . The optical system of claim 11 , wherein the at least one device is configured in such a way that the intensity of the excitation light is adjustable.
14 . The optical system of claim 11 , wherein the optical element has a side surface, and wherein the at least one device is configured in such a way that the excitation light is guided from the side surface into the partial region.
15 . The optical system of claim 11 , wherein the optical system has at least one second device alongside a first device, and
wherein the first device and the second device are configured in such a way that the excitation light has in each case a different angular spectrum and/or in each case a different intensity upon entrance into the optical element.
16 . A microlithography projection exposure apparatus comprising the optical system of claim 11 .
17 . A method for cooling an optical element, comprising:
irradiating the optical element with irradiation having a suitable excitation light,
wherein the optical element is a front surface mirror or a lens.