Chucking system with recessed support feature
View Patent ↗In an imprint lithography system, a recessed support on a template chuck may alter a shape of a template positioned thereon providing minimization and/or elimination of premature downward deflection of outer edges of the template in a nano imprint lithography process.
1. A chucking system, comprising:
a template chuck having a holding support section and a recessed support section, the recessed support section cincturing the holding support section, with
the holding support section having a plurality of lands for supporting a template, the lands extending a first height from the template chuck, and
the recessed support section having at least one recessed land for supporting a template, the recessed land extending a second height from the template chuck, wherein the second height is substantially less than the first height.
2. The chucking system of claim 1 , wherein the recessed land of the recessed support section extends from an outer edge of the template chuck.
3. The chucking system of claim 1 , further comprising a plurality of chambers formed between the recessed land of recessed support section, lands of holding support section, and portions of a template positioned on the template chuck.
4. The chucking system of claim 3 , wherein the plurality of chambers are configured to provide three zones: an outer bend zone, a hold zone, and a back pressure zone.
5. The chucking system of claim 4 , further comprising a pressure system in fluid communication with each chamber.
6. The chucking system of claim 1 , wherein the height of the recessed land is configured to provide physical clearance of a template positioned thereon from a substrate positioned in superimposition with the template.
7. The chucking system of claim 1 , wherein the height of recessed land as compared to the height of the lands of holding support section is configured to reduce stress of a template positioned thereon.
8. The chucking system of claim 1 , wherein dimensions of lands of holding support section are configured to substantially flatten a template positioned thereon.
9. The chucking system of claim 1 , wherein the height of the recessed land is configured to provide outer edges of a template positioned thereon to curve towards the template chuck.
10. The chucking system of claim 1 , further comprising a template positioned on template chuck, wherein the recessed land of the recessed support section is configured to alter the shape of the template substantially preventing downward deflection of outer edges of the template.
11. The chucking system of claim 10 , wherein the altered shape of the template deflects outer edges of the template upward.
12. The chucking system of claim 10 , further comprising a substrate positioned in superimposition with the template, the substrate coupled to a substrate chuck, the substrate chuck comprising a plurality of lands with at least one land being a recessed land having a height less than all other lands.
13. The chucking system of claim 12 , wherein the recessed land of the substrate chuck is positioned on an outer boundary of the substrate chuck.
14. The chucking system of claim 13 , wherein the recessed land of the substrate chuck alters the shape of the substrate such that outer edges of the substrate curve towards the substrate chuck.
15. A chucking system, comprising:
a template chuck having a back pressure zone;
a hold zone cincturing the back pressure zone; and
an outer bend zone cincturing the hold zone,
the hold zone having a plurality of lands for supporting a template, each land extending a height from the template chuck, and the outer bend zone having a recessed land positioned on an outer boundary of the template chuck, the recessed land extending from the template chuck a height substantially less than the height of the lands in the hold zone.
16. The chucking system of claim 15 , further comprising a template positioned on the template chuck wherein the height of the recessed land, as compared to the height of the lands of the hold zone, is configured to reduce stress of the template positioned thereon.
17. The chucking system of claim 15 , wherein dimensions of the lands of the hold zone are configured to substantially flatten a template positioned thereon.
18. The chucking system of claim 15 , wherein the back pressure zone, the hold zone, and the outer bend zone are in fluid communication with a pressure system.
19. The chucking system of claim 15 , wherein a template is positioned on the template chuck, the template is in superimposition with a substrate coupled to a substrate chuck, the substrate chuck having at least one recessed land positioned on an outer edge of the substrate chuck.