BONDING METHOD AND BONDING SUBSTRATE
A bonding method and a bonding substrate are provided. The bonding substrate is applied to a silicon wafer having the same shape. The bonding method includes the following steps. Firstly, the optical glass substrate is processed to form a first alignment mark. Then, an adhesive layer is coated on a surface of the optical glass substrate. The adhesive layer on the surface of the optical glass substrate is partially removed, thereby defining an adhesive structure. According to the first alignment mark of the optical glass substrate and a second first alignment mark of the silicon wafer, alignment between the optical glass substrate and the silicon wafer is performed. Afterwards, the optical glass substrate and the silicon wafer are bonded together through the adhesive structure.
1 . A bonding method for use between a silicon wafer and an optical glass substrate having the same shape, the bonding method comprising steps of:
processing the optical glass substrate to form a first alignment mark;
coating an adhesive layer on a surface of the optical glass substrate;
partially removing the adhesive layer on the surface of the optical glass substrate, thereby defining an adhesive structure;
performing alignment between the optical glass substrate and the silicon wafer according to the first alignment mark of the optical glass substrate and a second first alignment mark of the silicon wafer; and
bonding the optical glass substrate and the silicon wafer through the adhesive structure.
2 . The bonding method according to claim 1 wherein the first alignment mark is formed by performing a sandblasting treatment on the optical glass substrate, and an edge ring structure is simultaneously formed at an edge of the optical glass substrate by the sandblasting treatment.
3 . The bonding method according to claim 1 wherein the adhesive layer is formed by spin-coating an adhesive photoresist material on the surface of the optical glass substrate, and the adhesive structure is defined by using a mask to pattern the photoresist material.
4 . The bonding method according to claim 3 wherein the photomask further comprises a third alignment mark corresponding to the first alignment mark for facilitating alignment during the adhesive structure is formed by exposure with the photomask.
5 . The bonding method according to claim 1 wherein the location of the adhesive structure corresponds to a scribe line of the silicon wafer.
6 . A bonding substrate applied to a silicon wafer having the same shape, the bonding substrate comprising:
an optical glass substrate;
an adhesive structure overlying the optical glass substrate for providing adhesion required to bond the silicon wafer on the optical glass substrate; and
a first alignment mark formed on the optical glass substrate, wherein after alignment between the optical glass substrate and the silicon wafer is performed according to the first alignment mark of the optical glass substrate and a second first alignment mark of the silicon wafer, the optical glass substrate and the silicon wafer are bonded together through the adhesive structure.
7 . The bonding substrate according to claim 6 wherein the first alignment mark is an indentation formed by performing a sandblasting treatment on the optical glass substrate, and an edge ring structure is simultaneously formed at an edge of the optical glass substrate by the sandblasting treatment.
8 . The bonding substrate according to claim 6 wherein the adhesive layer is formed by spin-coating an adhesive photoresist material on a surface of the optical glass substrate, and the adhesive structure is defined by using a mask to pattern the photoresist material.
9 . The bonding substrate according to claim 8 wherein the photomask further comprises a third alignment mark corresponding to the first alignment mark for facilitating alignment during the adhesive structure is formed by exposure with the photomask.
10 . The bonding substrate according to claim 6 wherein the location of the adhesive structure corresponds to a scribe line of the silicon wafer.