Patent Application
Utility
App. No. 12/836,982
· Confirmation No. 3329
ILLUMINATION OPTICS FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Inventor:
Damian Fiolka
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-05-06 | ABN |
Abandonment | 3 | View | |
| 2012-10-12 | CTFR |
Final Rejection | 13 | View | |
| 2012-10-12 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-10-12 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2012-10-12 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-08-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-08-10 | CLM |
Claims | 5 | View | |
| 2012-08-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2012-08-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-08-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-06-08 | CTNF |
Non-Final Rejection | 12 | View | |
| 2012-06-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-06-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-06-08 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2012-06-08 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2012-06-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-11-04 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2010-07-29 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-07-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-07-15 | OATH |
Oath or Declaration filed | 3 | View | |
| 2010-07-15 | SPEC |
Specification | 17 | View | |
| 2010-07-15 | CLM |
Claims | 4 | View | |
| 2010-07-15 | ABST |
Abstract | 1 | View | |
| 2010-07-15 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2010-07-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-07-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-07-15 | TRNA |
Transmittal of New Application | 2 | View | |
| 2010-07-15 | ADS |
Application Data Sheet | 4 | View | |
| 2010-07-15 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-07-15 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Damian Fiolka
Oberkochen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/67
G03F7/70108
Prosecution
- Examiner
- WHITESELL, STEVEN H
- Art Unit
- 2882
- Customer No.
- 26161
- Docket No.
- 21070-0036002
- Confirmation No.
- 3329
Foreign Priority
102008041179.5
·
2008-08-12
·
GERMANY
Publication
- Pub. No.
- US20100277707A1
- Pub. Date
- 2010-11-04
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Quick Facts
- App. No.
- 12/836,982
- Filed
- 2010-07-15
- Pub. No.
- US20100277707A1
- Examiner
- WHITESELL, STEVEN H
- Art Unit
- 2882
External Links