IP Library Granted Patent US 8,536,693
Granted Patent B2
US 8,536,693 · App. 12/840,218 · Granted Sep 17, 2013

Tiered integrated circuit assembly and a method for manufacturing the same

Inventors: Thomas Dungan (Fort Collins, CO); Peter Mark O'Neill (Fort Collins, CO)
Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
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Quick Facts
Patent No.
US 8,536,693
App. No.
12/840,218
Granted
Sep 17, 2013
Kind
B2
Abstract

A tiered integrated circuit (IC) assembly includes stacks of a limited number of ICs coupled to each other and arranged in a first direction across a base tier and a second tier. The base tier includes ICs and a data bridge. Each of the ICs includes a respective array of through silicon vias (TSVs) arranged in parallel with the first direction. The data bridge includes submicron metal interconnects (densely spaced electrical conductors) arranged in a plane that is substantially orthogonal to the first direction. The second tier is adjacent to the base tier and includes respective high-performance ICs different from the ICs of the base tier. The TSVs provide power and ground paths to the ICs in the second tier. In an example embodiment, the ICs in the second tier support one or more data bridges for connecting adjacent stacks.

Claims (28)

1. A tiered assembly of integrated circuits (ICs), comprising:

a base tier including a first set of ICs and a data bridge, the ICs each having a respective array of through silicon vias (TSVs), the data bridge having submicron metal interconnects arranged in a plane that is substantially orthogonal to a longitudinal axis of the TSVs; and

a second tier adjacent to the base tier, the second tier including a second set of ICs, different from the first set of ICs, at least two members of the second set of ICs coupled to each other by the data bridge, the submicron metal interconnects of the data bridge providing an interconnect density and signal integrity between the second set of ICs coupled by the data bridge that is substantially similar to that provided by internal connections in the second set of ICs, wherein the second set of ICs generate thermal energy at a rate that requires an external thermal transfer element to maintain thermal equilibrium within the respective members of the second set of ICs.

2. The assembly of claim 1 , wherein respective major surfaces of the first set of ICs and the data bridge are substantially parallel.

3. The assembly of claim 2 , wherein adjacent members of the first set of ICs are separated from each other by the data bridge.

4. The assembly of claim 1 , wherein the first set of ICs comprises circuits that in operation generate thermal energy at a rate that results in thermal equilibrium within the respective members of the first set of ICs in the absence of a thermal transfer element.

5. The assembly of claim 1 , wherein the first set of ICs comprises one or more of a memory element, a bypass capacitor, a power regulating transistor, and an electrostatic discharge protector.

6. The assembly of claim 1 , wherein the submicron metal interconnects are made with technology similar to that used in making the second set of ICs.

7. The assembly of claim 1 , wherein the submicron metal interconnects include at least one arranged with an angle.

8. The assembly of claim 1 , wherein the base tier further comprises a third set of ICs, the third set of ICs coupled to corresponding members of the second set of ICs.

9. The assembly of claim 8 , wherein the third set of ICs electrically support an optical device.

10. The assembly of claim 8 , wherein a member of the third set of ICs is coupled to a member of the second set of ICs by submicron metal interconnects arranged in a plane that is substantially orthogonal to a longitudinal axis of the TSVs.

11. The assembly of claim 1 , further comprising:

a third tier adjacent to the second tier and removed from the base tier, the third tier comprising a thermal transfer element.

12. The assembly of claim 11 , wherein the thermal transfer element comprises a heat sink.

13. The assembly of claim 11 , wherein the thermal transfer element comprises a silicon platen.

14. The assembly of claim 1 , further comprising:

a power interface tier adjacent to the base tier and removed from the second tier, the power interface tier including a respective connection that provides a supply voltage from an external source to each member of the second set of ICs by way of the TSVs in the first set of IC devices.

15. The assembly of claim 14 , wherein the power interface tier comprises a silicon support structure with TSVs arranged in registration with corresponding TSVs of the first set of ICs.

16. A tiered integrated circuit (IC) assembly, comprising:

a first tier including a first set of ICs and a data bridge, the first set of ICs each having a respective array of through silicon vias (TSVs), the data bridge including submicron metal interconnects arranged near a surface of the data bridge; and

a second tier adjacent to the first tier, the second tier including a second set of ICs that generate thermal energy at a rate that requires an external thermal transfer element to maintain thermal equilibrium, adjacent members of the second set of ICs coupled to one another by the data bridge, the submicron metal interconnects of the data bridge providing an interconnect density and signal integrity between the second set of ICs coupled by the data bridge that is substantially similar when compared to the interconnect density and signal integrity provided by internal connections in the second set of ICs, the data bridge being supported along at least two edges by the adjacent members of the second set of ICs.

17. The assembly of claim 16 , further comprising:

respective connectors coupled to each member of the first set of ICs; and

a silicon structure directly supporting the second tier.

18. The assembly of claim 16 , further comprising:

wherein the second tier further comprises a third set of ICs that electrically support a respective optical device; and

a second data bridge between a member of the third set of ICs and an adjacent member of the second set of ICs, the second data bridge providing data signals in a direction that is substantially orthogonal to a longitudinal axis of the TSVs.

Assignments (12)
MERGER Recorded Mar 3, 2023
From: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED; BROADCOM INTERNATIONAL PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 062952/0850 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 14, 2020
From: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
To: BROADCOM INTERNATIONAL PTE. LTD.
Reel/Frame 053771/0901 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ERROR IN RECORDING THE MERGER IN THE INCORRECT US PATENT NO. 8,876,094 PREVIOUSLY RECORDED ON REEL 047351 FRAME 0384. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER. Recorded Mar 8, 2019
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 049248/0558 →
CORRECTIVE ASSIGNMENT TO CORRECT THE EFFECTIVE DATE OF THE MERGER PREVIOUSLY RECORDED AT REEL: 047230 FRAME: 0910. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER. Recorded Oct 29, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047351/0384 →
MERGER Recorded Oct 4, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047230/0910 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS Recorded Feb 3, 2017
From: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
To: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
Reel/Frame 041710/0001 →
PATENT SECURITY AGREEMENT Recorded Feb 11, 2016
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
Reel/Frame 037808/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS (RELEASES RF 032851-0001) Recorded Feb 2, 2016
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
Reel/Frame 037689/0001 →
PATENT SECURITY AGREEMENT Recorded May 8, 2014
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 032851/0001 →
MERGER Recorded May 7, 2013
From: AVAGO TECHNOLOGIES ENTERPRISE IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
Reel/Frame 030370/0008 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 23, 2010
From: DUNGAN, THOMAS; O'NEILL, PETER MARK
To: AVAGO TECHNOLOGIES ENTERPRISE IP (SINGAPORE) PTE. LTD.
Reel/Frame 024735/0483 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 20, 2010
From: DUNGAN, THOMAS; O'NEILL, PETER MARK
To: AVAGO TECHNOLOGIES ENTERPRISE IP (SINGAPORE) PTE. LTD.
Reel/Frame 024716/0735 →
Continuity (1)
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