Thin film patterning apparatus and method of fabricating color filter array substrate using the same
A fabricating method of a color filter array substrate includes the steps of forming a black matrix on a substrate, forming red, green, blue color filters on the substrate on which the black matrix is formed, forming an overcoat layer including a white color filter on the substrate on which the red, green, and blue color filters are formed, aligning a flat panel soft mold to the overcoat layer; and smoothing the overcoat layer using the flat panel soft mold.
1. A fabricating method of a color filter array substrate, comprising the steps of:
forming a black matrix that defines pixel areas on a substrate;
forming a color filter in the pixel areas;
coating a transparent resin over the substrate where the color filter is formed;
aligning a soft mold having a groove and a flat surface to an upper part of the substrate where the transparent resin is formed; and
simultaneously forming an overcoat layer and a rib by molding the transparent resin with the soft mold, the rib being formed for each pixel area so that an arrangement direction of a liquid crystal is adjusted to be in a plurality of directions,
wherein the overcoat layer has a flat surface corresponding to the flat surface of the soft mold, and
wherein the rib overlaps the color filter and projects, from the flat surface of the overcoat layer, corresponding to the groove of the soft mold.
2. The fabricating method according to claim 1 , wherein the step of simultaneously forming the rib and the overcoat layer includes the steps of:
pressing the soft mold into the transparent resin; and
forming the rib by having the transparent resin move into the groove, and forming the overcoat layer which is flat by having the flat surface of the soft mold in contact with the transparent resin.
3. The fabricating method according to claim 2 , wherein the step of pressing the soft mold to the transparent resin includes the step of:
pressing the soft mold into the transparent resin at about its own weight; and
soft-curing the transparent resin by baking at a temperature of about 130° C. for about 10 minutes to 2 hours or by irradiating an ultraviolet ray onto the transparent resin.
4. The fabricating method according to claim 1 , wherein the transparent resin is formed of any one of a liquid pre-polymer and a liquefied polymer.
5. The fabricating method according to claim 1 , wherein the soft mold includes any one of polydimethylsiloxane PDMS, polyurethane and cross-linked novolac resin.