Die including a groove extending from a via to an edge of the die
View Patent ↗Embodiments include but are not limited to apparatuses and systems including a die or a preform including at least one groove configured to extend from at least one via of the die to an edge of the die. Other embodiments may be described and claimed.
1. An apparatus comprising:
a semiconductor die including at least one via; and
at least one groove on a surface of the semiconductor die and extending from the at least one via to an edge of the semiconductor die, the at least one groove having a recessed surface, wherein the at least one via includes a conductive material disposed therein and extends into the semiconductor die beyond the recessed surface of the at least one groove.
2. The apparatus of claim 1 , wherein the surface of the die comprises a conductive layer, and wherein the at least one via extends through the conductive layer.
3. The apparatus of claim 1 , further comprising a substrate, wherein the surface of the die is coupled with the substrate.
4. The apparatus of claim 3 , wherein the die is coupled with the substrate by a solder material, and portions of the at least one groove and the at least one via are filled with the solder material.
5. The apparatus of claim 1 , wherein the die includes a plurality of vias and a plurality of grooves, and wherein the plurality of grooves are arranged to interconnect each of the plurality of vias to at least one of a plurality of edges of the die.
6. The apparatus of claim 1 , wherein the at least one groove has a depth between 5 and 10 micrometers.
7. The apparatus of claim 1 , wherein the at least one groove further extends from a first via to a second via.
8. The apparatus of claim 1 , wherein the at least one groove comprises a plurality of intersecting grooves.
9. A method comprising:
providing a semiconductor die including at least one via; and
forming at least one groove on a surface of the semiconductor die such that the at least one groove extends from the at least one via to an edge of the semiconductor die, the at least one groove having a recessed surface, wherein the at least one via includes a conductive material disposed therein and extends into the semiconductor die beyond the recessed surface of the at least one groove.
10. The method of claim 9 , further comprising coupling the surface of the die with a substrate by a solder material.
11. The method of claim 10 , wherein the coupling comprises filling at least portions of the at least one groove and the at least one via with the solder material.
12. A system comprising:
a transceiver to provide a radio frequency (RF) input signal; and
a radio frequency (RF) power amplifier coupled with the transceiver, to receive the RF input signal from the transceiver, and to output an amplified RF signal, the power amplifier including:
a semiconductor die including at least one via; and
at least one groove on a surface of the semiconductor die and extending from the at least one via to an edge of the semiconductor die, the at least one groove having a recessed surface, wherein the at least one via includes a conductive material disposed therein and extends into the semiconductor die beyond the recessed surface of the at least one groove.
13. The system of claim 12 , further comprising an antenna structure coupled with the power amplifier and configured to facilitate transmission of the amplified RF signal.
14. The system of claim 12 , wherein the system is a radar device, a satellite communication device, a mobile handset, a base station, a broadcast radio, or a television amplifier system.