Method for fabricating MEMS structure
View Patent ↗A method for fabricating a MEMS is described as follows. A substrate is provided, including a circuit region and a MEMS region separated from each other. A first metal interconnection structure is formed on the substrate in the circuit region, and simultaneously a first dielectric structure is formed on the substrate in the MEMS region. A second metal interconnection structure is formed on the first metal interconnection structure, and simultaneously a second dielectric structure, at least two metal layers and at least one protection ring are formed on the first dielectric structure. The metal layers and the protection ring are formed in the second dielectric structure and the protection ring connects two adjacent metal layers to define an enclosed space between two adjacent metal layers. The first dielectric structure and the second dielectric structure outside the enclosed space are removed to form a MEMS device in the MEMS region.
1. A method for fabricating a MEMS, comprising:
providing a substrate, comprising a circuit region and a MEMS region separated from each other;
forming a first metal interconnection structure on the substrate in the circuit region, and simultaneously forming a first dielectric structure on the substrate in the MEMS region;
forming a second metal interconnection structure on the first metal interconnection structure, and simultaneously forming a second dielectric structure, at least two metal layers and at least one protection ring on the first dielectric structure, wherein the metal layers and the protection ring are formed in the second dielectric structure and the protection ring connects two adjacent metal layers, so as to define an enclosed space between the two adjacent metal layers; and
removing the first dielectric structure and the second dielectric structure outside the enclosed space, so as to form a MEMS device in the MEMS region.
2. The method according to claim 1 , wherein the protection ring substantially corresponds to a profile of each metal layer.
3. The method according to claim 1 , wherein the protection ring comprises metal.
4. The method according to claim 1 , further comprising forming a semiconductor device in the circuit region before forming the first metal interconnection structure, wherein the semiconductor device connects with the first metal interconnection structure.
5. The method according to claim 4 , wherein the semiconductor device comprises a complementary metal oxide semiconductor (CMOS) device.
6. The method according to claim 1 , wherein the MEMS device comprises a suspended part and a fixed part.
7. The method according to claim 6 , further comprising forming a metal plug in the first dielectric structure, wherein the metal plug connects the fixed part and the substrate.
8. The method according to claim 1 , wherein a structure of the MEMS device comprises a cantilever beam, a bridge, or a membrane.