Semiconductor process
View Patent ↗A semiconductor process of the present invention is described as follows. A substrate is provided, and a material layer is deposited on the substrate using an organic precursor as a reactant gas. A plasma treatment is conducted immediately after depositing the material layer, wherein plasma is continuously supplied during depositing the material layer and the plasma treatment. A pump-down step is conducted.
1. A semiconductor process, comprising the following steps in the sequence set forth:
providing a substrate;
providing a reactant gas and a carrier gas with a plasma treatment to deposit a material layer on the substrate;
terminating providing the reactant gas while keeping providing the carrier gas with the plasma treatment after the material layer is deposited to a predetermined thickness; and
conducting a pump-down step.
2. The semiconductor process according to claim 1 , further comprising conducting a purge step between the plasma treatment and the pump-down step.
3. The semiconductor process according to claim 1 , wherein the reactant gas comprises an organic precursor, and the organic precursor comprises an organosiloxane-based precursor.
4. The semiconductor process according to claim 3 , wherein the organosiloxane-based precursor is selected from the group consisting of tetraethyl orthosilicate (TEOS; Si(OC2H5)4), 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS; C4H16O4Si4), dimethyldimethoxysilane (DMDMOS; C4H12O2Si) and octamethylcyclotetrasiloxane (OMCTS; C8H24O4Si4).
5. The semiconductor process according to claim 1 , wherein the reactant gas comprises a organic precursor, and the organic precursor is supplied from a liquid system through gasification.
6. The semiconductor process according to claim 1 , further comprising providing a gas source comprising the reactant gas and the carrier gas, wherein the gas source comprises inert gas or oxygen or hydrogen.
7. The semiconductor process according to claim 1 , further comprising providing a gas source comprising the reactant gas and the carrier gas, wherein a flow rate of the gas source is within a range of 1000 sccm to 40000 sccm.
8. The semiconductor process according to claim 1 , wherein a power used for the plasma treatment is within a range of 100 W to 4000 W.
9. The semiconductor process according to claim 1 , wherein a temperature used for the plasma treatment is within a range of 300° C. to 500° C.
10. The semiconductor process according to claim 1 , wherein a pressure used for the plasma treatment is within a range of 0.5 Torr to 20 Torr.
11. The semiconductor process according to claim 1 , wherein the plasma is generated with a first radio frequency power and a second radio frequency power having a lower frequency than that of the first radio frequency, and the second radio frequency power is turned off immediately after depositing the material layer.
12. The semiconductor process according to claim 1 , wherein the carrier gas comprises helium (He), argon (Ar) or nitrogen (N2).
13. The semiconductor process according to claim 1 , wherein the pump-down step is performed after terminating providing the reactant gas while keeping providing the carrier gas with the plasma treatment.