IP Library Granted Patent US 8,704,347
Granted Patent B2
US 8,704,347 · App. 12/857,054 · Granted Apr 22, 2014

Packaged semiconductor chips

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Quick Facts
Patent No.
US 8,704,347
App. No.
12/857,054
Granted
Apr 22, 2014
Kind
B2
Abstract

A chip-sized wafer level packaged device including a portion of a semiconductor wafer including a device, a packaging layer formed over the portion of the semiconductor wafer, the packaging layer including a material having thermal expansion characteristics similar to those of the semiconductor wafer and a ball grid array formed over a surface of the packaging layer and being electrically connected to the device.

Claims (35)

1. A chip-sized wafer level packaged device comprising:

a chip embodying a device, said chip having a surface, an opposed surface, and bond pads at said surface;

a chip-sized silicon packaging layer overlying an opposed surface of said chip, said packaging layer comprising a material having thermal expansion characteristics similar to those of said semiconductor wafer, the silicon packaging layer having a surface facing away from said chip, and openings extending through said packaging layer at locations overlying said bond pads, the chip and the packaging layer having edge surfaces extending away from the surface of the chip and the surface of the packaging layer, respectively;

a ball grid array formed over said surface of said packaging layer and being electrically coupled to said bond pads;

an insulating layer coating inner surfaces of at least some of the openings;

a compliant layer including platforms formed of compliant material different from a material of the insulating layer overlying said surface of said packaging layer, each of said platforms having formed thereon a ball of said ball grid array; and

an adhesive layer overlying said silicon packaging layer and underlying said platforms,

wherein said platforms are bonded to said silicon packaging layer through said adhesive layer.

2. The chip-sized wafer level packaged device according to claim 1 , wherein said edge surfaces bound said chip, said bond pads being remote from said edge surfaces.

3. The chip-sized wafer level packaged device according to claim 2 , wherein the edge surfaces are exposed.

4. The chip-sized wafer level packaged device according to claim 1 , wherein said compliant layer comprises silicone.

5. The chip-sized wafer level packaged device according to claim 1 , wherein said device is a DRAM device.

6. The chip-sized wafer level packaged device according to claim 1 , wherein said semiconductor wafer contains at least one of silicon and Gallium Arsenide.

7. The chip-sized wafer level packaged device according to claim 1 , wherein said silicon packaging layer is adhered to said portion of said semiconductor wafer by an adhesive, said adhesive having thermal expansion characteristics similar to those of said packaging layer.

8. The chip-sized wafer level packaged device according to claim 1 and wherein said packaging layer comprises silicon.

9. The chip-sized wafer level packaged device according to claim 1 , further comprising metal connections formed over said compliant layer and underlying said ball grid array, said metal connections providing electrical connection between said ball grid array and said device.

10. The chip-sized wafer level packaged device according to claim 1 , further comprising alpha-particle shielding provided between said ball grid array and said device.

11. The chip-sized wafer level packaged device according to claim 10 , wherein said alpha-particle shielding is provided by at least one second compliant layer formed over said packaging layer and underlying said ball grid array.

12. The chip-sized wafer level packaged device according to claim 11 , wherein said at least one second compliant layer is said insulating layer.

13. The chip-sized wafer level packaged device according to claim 1 and wherein said device includes a memory device.

14. A chip-sized wafer level packaged device comprising:

a chip embodying a device, said chip having a surface and bond pads at said surface;

a chip-sized silicon packaging layer overlying said surface of said chip, said packaging layer comprising a material having thermal expansion characteristics similar to those of said semiconductor wafer, the silicon packaging layer having a surface facing away from said chip, and openings extending through said packaging layer at locations overlying said bond pads, the chip and the packaging layer having edge surfaces extending away from the surface of the chip and the surface of the packaging layer, respectively;

a ball grid array formed over said surface of said packaging layer and being electrically coupled to said bond pads; and

an insulating layer coating inner surfaces of at least some of the openings.

15. The chip-sized wafer level packaged device according to claim 14 , wherein the edge surfaces are exposed.

16. The chip-sized wafer level packaged device according to claim 14 , wherein the edge surfaces define a common plane.

17. The chip-sized wafer level packaged device according to claim 14 , wherein said edge surfaces bound said chip, said bond pads being remote from said edge surfaces.

18. A chip-sized wafer level packaged device comprising:

a chip embodying a device, said chip having a front surface, an opposed rear surface, and bond pads exposed at said front surface;

a chip-sized silicon packaging layer overlying said rear surface of said chip, said packaging layer comprising a material having thermal expansion characteristics similar to those of said semiconductor wafer, the silicon packaging layer having a surface facing away from said chip, and openings extending through said packaging layer at locations overlying said bond pads;

a ball grid array formed over said surface of said packaging layer and being electrically coupled to said bond pads; and

an insulating layer coating inner surfaces of at least some of the openings.

19. The chip-sized wafer level packaged device of claim 18 , wherein the chip and the packaging layer having edge surfaces extending away from the surface of the chip and the surface of the packaging layer, respectively, the edge surfaces being exposed.

20. The chip-sized wafer level packaged device of claim 18 , further comprising another chip sized silicon packaging layer overlying said front surface of said chip.

Assignments (6)
CHANGE OF NAME Recorded Nov 21, 2025
From: TESSERA, INC.
To: TESSERA LLC
Reel/Frame 073657/0979 →
CHANGE OF NAME Recorded Nov 21, 2025
From: TESSERA LLC
To: ADEIA SEMICONDUCTOR SOLUTIONS LLC
Reel/Frame 073658/0661 →
RELEASE OF SECURITY INTEREST Recorded Jun 11, 2020
From: ROYAL BANK OF CANADA
To: TESSERA, INC.; INVENSAS BONDING TECHNOLOGIES, INC. (F/K/A ZIPTRONIX, INC.); FOTONATION CORPORATION (F/K/A DIGITALOPTICS CORPORATION AND F/K/A DIGITALOPTICS CORPORATION MEMS); INVENSAS CORPORATION; TESSERA ADVANCED TECHNOLOGIES, INC; DTS, INC.; DTS LLC; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
Reel/Frame 052920/0001 →
SECURITY INTEREST Recorded Jun 1, 2020
From: ROVI SOLUTIONS CORPORATION; ROVI TECHNOLOGIES CORPORATION; ROVI GUIDES, INC.; TIVO SOLUTIONS INC.; VEVEO, INC.; INVENSAS CORPORATION; INVENSAS BONDING TECHNOLOGIES, INC.; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: BANK OF AMERICA, N.A.
Reel/Frame 053468/0001 →
SECURITY INTEREST Recorded Dec 2, 2016
From: INVENSAS CORPORATION; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; ZIPTRONIX, INC.; DIGITALOPTICS CORPORATION; DIGITALOPTICS CORPORATION MEMS; DTS, LLC; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: ROYAL BANK OF CANADA, AS COLLATERAL AGENT
Reel/Frame 040797/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 5, 2013
From: GRINMAN, ANDREY; OVRUTSKY, DAVID; ROSENSTEIN, CHARLES; HABA, BELGACEM; OGANESIAN, VAGE
To: TESSERA, INC.
Reel/Frame 031257/0464 →