Method and apparatus for controlling and monitoring the potential
An electroplating apparatus including a reference electrode to control the potential during an electro-deposition process. The electroplating apparatus may include a bath containing a plating electrolyte and an anode present in a first portion of the bath containing the plating electrolyte. A cathode is present in a second portion of the bath containing the plating electrolyte. A reference electrode is present at a perimeter of the cathode. The electroplating apparatus also includes a control system to bias the cathode and the anode to provide a potential. A measuring system is provided in electrical communication with the reference electrode to measure the potential of the cathode. Methods of using the above described electroplating apparatus are also provided. Structures and method for electroless deposition are also provided.
1. An electroplating apparatus comprising:
a bath containing a plating electrolyte;
an anode present in a first portion of the bath containing the plating electrolyte;
a cathode present in a second portion of the bath containing the plating electrolyte, wherein the cathode is engaged to a sidewall of the bath containing the plating electrolyte by a holder;
a control system to bias the cathode and the anode to provide a potential;
a thief electrode mounted to the holder and present at a perimeter of said cathode;
a reference electrode mounted to the holder and present at a perimeter of said cathode, said reference electrode is located in close proximity to the cathode and is separated from the cathode by a radial gap, wherein the reference electrode is positioned between the cathode and the thief electrode, and wherein the reference electrode is not biased by the control system; and
a measuring system in electrical communication with the reference electrode to measure the potential by measuring a potential difference between the reference electrode and the cathode.
2. The electroplating apparatus of claim 1 , wherein the cathode is multi-sided and the reference electrode is multi-sided.
3. The electroplating apparatus of claim 1 , wherein the reference electrode is separated from the holder of the cathode and is present between the cathode and the anode.
4. The electroplating apparatus of claim 1 , wherein the cathode is substantially concentric.
5. The electroplating apparatus of claim 4 , wherein the reference electrode is substantially concentric.
6. The electroplating apparatus of claim 1 , wherein the reference electrode has a face in contact with the electrolyte that is coplanar with a plating surface of the cathode, or the face of the reference electrode that is in contact with the plating electrolyte is offset from the plating surface of the cathode.
7. The electroplating apparatus of claim 6 , wherein the face of the reference electrode that is contacting the plating electrolyte is offset from the plating surface of the cathode, wherein the reference electrode has a body that is overlapping a portion of the plating surface of the cathode.
8. An electroplating apparatus comprising:
a bath containing a plating electrolyte;
an anode present in a first portion of the bath containing the plating electrolyte and connected to a first terminal of a control system;
a cathode present in a second portion of the bath containing the plating electrolyte and connected to a second terminal of the control system, wherein the cathode is engaged to a sidewall of the bath containing the plating electrolyte by a holder;
a reference electrode mounted to the holder, the reference electrode present at a perimeter of the cathode and in close proximity to the cathode, wherein the reference electrode has a body overlapping a portion of a plating surface of the cathode, and wherein the reference electrode is not biased by the control system; and
a thief electrode mounted to the holder and present at a perimeter of the reference electrode.
9. The electroplating apparatus of claim 8 , wherein the reference electrode is overlapping about 0.1% to 20% of a surface area of the cathode.