Metal gate transistor and method for fabricating the same
A method for fabricating metal gate transistor is disclosed. The method includes the steps of: providing a substrate, wherein the substrate comprises a transistor region defined thereon; forming a gate insulating layer on the substrate; forming a stacked film on the gate insulating layer, wherein the stacked film comprises at least one etching stop layer, a polysilicon layer, and a hard mask; patterning the gate insulating layer and the stacked film for forming a dummy gate on the substrate; forming a dielectric layer on the dummy gate; performing a planarizing process for partially removing the dielectric layer until reaching the top of the dummy gate; removing the polysilicon layer of the dummy gate; removing the etching stop layer of the dummy gate for forming an opening; and forming a conductive layer in the opening for forming a gate.
1. A method for fabricating a metal gate transistor, comprising:
providing a substrate, wherein the substrate comprises a transistor region defined thereon;
forming a gate insulating layer on the substrate;
forming a stacked film on the gate insulating layer, wherein the stacked film comprises at least one etching stop layer directly contacting the gate insulating layer, a polysilicon layer on the etching stop layer, and a hard mask on the polysilicon layer;
patterning the gate insulating layer and the stacked film for forming a dummy gate on the substrate;
forming a dielectric layer on the dummy gate;
performing a planarizing process for partially removing the dielectric layer until reaching the top of the dummy gate;
removing the polysilicon layer of the dummy gate;
removing the etching stop layer of the dummy gate for forming an opening;
forming a conductive layer in the opening for forming a gate.
2. The method of claim 1 , wherein the etching stop layer comprises a silicon nitride layer.
3. The method of claim 1 , wherein the etching stop layer comprises a thickness of less than 100 Angstroms.
4. The method of claim 1 , wherein the gate insulating layer comprises silicon oxide.
5. The method of claim 1 , further comprising forming a first spacer on the sidewall of the dummy gate before forming the dielectric layer, wherein the first spacer and the etching stop layer comprises different etching selectivity.
6. The method of claim 5 , wherein the first spacer comprises silicon oxide.
7. The method of claim 5 , further comprising forming a lightly doped drain in the substrate adjacent to two sides of the first spacer.
8. The method of claim 7 , further comprising forming a second spacer on the sidewall of the first spacer after forming the lightly doped drain.
9. The method of claim 8 , further comprising forming a source/drain region in the substrate adjacent two sides of the second spacer.
10. The method of claim 8 , wherein the second spacer comprises silicon oxide and silicon nitride.
11. The method of claim 1 , further comprising performing a wet etching process for removing the etching stop layer.
12. The method of claim 11 , further comprising utilizing phosphoric acid for performing the wet etching process.
13. The method of claim 1 , wherein the conductive layer is selected from Al, Co, TiAl, CoWP, or combination thereof.
14. The method of claim 1 , further comprising forming a high-k dielectric layer in the opening before forming the conductive layer.
15. The method of claim 14 , wherein the high-k dielectric layer comprises HfSiO, HfSiON, HfO, LaO, LaAlO, ZrO, ZrSiO, HfZrO, or combination thereof.