MEMS pressure sensor device and method of fabricating same
View Patent ↗A microelectromechanical systems (MEMS) pressure sensor device ( 20, 62 ) includes a substrate structure ( 22, 64 ) having a cavity ( 32, 68 ) formed therein and a substrate structure ( 24 ) having a reference element ( 36 ) formed therein. A sense element ( 44 ) is interposed between the substrate structures ( 22, 24 ) and is spaced apart from the reference element ( 36 ). The sense element ( 44 ) is exposed to an external environment ( 48 ) via one of the cavity ( 68 ) and a plurality of openings ( 38 ) formed in the reference element ( 36 ). The sense element ( 44 ) is movable relative to the reference element ( 36 ) in response to a pressure stimulus ( 54 ) from the environment ( 48 ). Fabrication methodology ( 76 ) entails forming ( 78 ) the substrate structure ( 22, 64 ) having the cavity ( 32, 68 ), fabricating ( 84 ) the substrate structure ( 24 ) including the sense element ( 44 ), coupling ( 92 ) the substrate structures, and subsequently forming ( 96 ) the reference element ( 36 ) in the substrate structure ( 24 ).
1. A method of producing a microelectromechanical systems (MEMS) sensor device comprising:
forming a first substrate structure having a cavity;
forming a sense element from a material layer of a second substrate structure;
coupling said second substrate structure with said first substrate structure such that said sense element is interposed between said first and second substrate structures and is aligned with said cavity; and
forming a reference element in said second substrate structure aligned with said sense element, said reference element including a plurality of openings extending through said second substrate structure, wherein said sense element is exposed to an environment external to said MEMS sensor device via one of said cavity and said plurality of openings.
2. A method as claimed in claim 1 wherein:
said forming said sense element comprises depositing a sacrificial layer on a surface of a wafer substrate and depositing said material layer on said sacrificial layer; and
said method further comprises removing said sacrificial layer between said reference element and said sense element via said plurality of openings in said reference element following said coupling operation, said removing operation producing a gap between said reference element and said sense element.
3. A method as claimed in claim 1 wherein said forming said sense element includes producing said sense element having a first thickness that is less than a second thickness of said reference element.
4. A method as claimed in claim 3 wherein said first thickness of said sense element is less than fifteen percent of said second thickness of said reference element.
5. A method as claimed in claim 1 wherein said forming said first substrate structure produces said cavity having a depth that is less than a thickness of said first substrate structure, and said sense element is exposed to said environment via said plurality of openings.
6. A method as claimed in claim 5 wherein said coupling operation comprises controlling a cavity pressure of said cavity such that said cavity pressure is less than atmospheric pressure.
7. A method as claimed in claim 6 wherein said material layer is deposited on a first side of said second substrate structure, and said method further comprises attaching a cap to a second side of said second substrate structure to form a chamber in which said reference element is located; and
providing a port extending through said cap so that said sense element is exposed to said environment via said port.
8. A method as claimed in claim 1 wherein said forming said first substrate structure produces said cavity through a thickness of said first substrate structure, and said sense element is exposed to said environment via said cavity.
9. A method as claimed in claim 8 wherein said material layer is deposited on a first side of said second substrate structure, and said method further comprises attaching a cap to a second side of said second substrate structure to form a hermetically sealed chamber in which said reference element is located.
10. A method as claimed in claim 1 wherein said MEMS sensor device is a pressure sensor, and said sense element is a diaphragm that is movable relative to said reference element in response to a pressure stimulus from said environment, and said forming said sense element comprises forming said diaphragm from polycrystalline silicon.
11. A microelectromechanical systems (MEMS) sensor device comprising;
a first substrate structure having a cavity formed therein; and
a second substrate structure having a reference element formed in said second substrate structure and aligned with said cavity, said reference element including a plurality of openings extending through said second substrate structure;
a sense element disposed on a first side of said second substrate structure and aligned with said reference element, said sense element being spaced apart from said reference element to form a gap between said sense element and said reference element, said sense element being exposed to an environment external to said MEMS sensor device via one of said cavity and said plurality of openings, and said sense element being movable relative to said reference element in response to a pressure stimulus from said environment.
12. A MEMS sensor device as claimed in claim 11 wherein said sense element exhibits a first thickness that is less than a second thickness of said reference element.
13. A MEMS sensor device as claimed in claim 12 wherein said first thickness is less than fifteen percent of said second thickness of said reference element.
14. A MEMS sensor device as claimed in claim 11 wherein said cavity has a depth that is less than a thickness of said first substrate structure, and said sense element is exposed to said environment via said plurality of openings.
15. A MEMS sensor device as claimed in claim 14 further comprising a cap attached to a second side of said second substrate structure to form a chamber in which said reference element is located, said cap including a port extending through said cap so that said sense element is exposed to said environment via said port.
16. A MEMS sensor device as claimed in claim 11 wherein said cavity extends through a thickness of said first substrate structure, said sense element being exposed to said environment via said cavity, and said MEMS sensor device further comprises a cap attached to a second side of said second substrate structure to form a hermetically sealed chamber in which said reference element is located.
17. A MEMS sensor device as claimed in claim 11 wherein said sense element and said reference element form a capacitive pressure sensor.
18. A method of producing a microelectromechanical systems (MEMS) sensor device comprising:
forming a first substrate structure including a cavity;
forming a sense element from a material layer on a first side of a second substrate structure, said forming said sense element including depositing a sacrificial layer on a wafer substrate and depositing said material layer on said sacrificial layer;
coupling said second substrate structure with said first substrate structure such that said sense element is interposed between said first and second substrate structures and is aligned with said cavity;
forming a reference element in said second substrate structure aligned with said sense element, said reference element including a plurality of openings extending through said second substrate;
removing said sacrificial layer between said reference element and said sense element via said plurality of openings in said reference element following said coupling operation, said removing operation producing a gap between said reference element and said sense element; and
attaching a cap to a second side of said second substrate structure to form a chamber in which said reference element is located, wherein said sense element is exposed to an environment external to said MEMS sensor device via one of said cavity and said plurality of openings, and said sense element is movable relative to said reference element in response to a pressure stimulus from said environment.
19. A method as claimed in claim 18 wherein:
said forming said first substrate structure produces said cavity having a depth that is less than a thickness of said first substrate structure; and
providing a port extending through said cap so that said sense element is exposed to said environment via said port.
20. A method as claimed in claim 18 wherein:
said forming said first substrate structure produces said cavity through a thickness of said first substrate structure, said sense element being exposed to said environment via said cavity; and
said coupling said cap forms a hermetically sealed chamber bounded by said cap and said sense element in which said reference element is located.