Radiation-sensitive composition, polymer and monomer
A polymer includes a repeating unit shown by a general formula (1) in which R 1 represents a hydrogen atom or a methyl group, R 2 represents a substituted or unsubstituted linear or branched monovalent alkyl group having 1 to 20 carbon atoms, an alicyclic group having 3 to 25 carbon atoms, or an aryl group having 6 to 22 carbon atoms, and X represents a substituted or unsubstituted methylene group or a substituted or unsubstituted linear, branched or alicyclic hydrocarbon group having 2 to 25 carbon atoms. The polymer has a polystyrene-reduced weight average molecular weight determined by gel permeation chromatography (GPC) of 3000 to 100,000.
1. A polymer comprising:
a repeating unit shown by a general formula (1-1); and
a polystyrene-reduced weight average molecular weight determined by gel permeation chromatography (GPC) of 3000 to 100,000,
wherein R 1 represents a hydrogen atom or a methyl group, and R 3 represents a substituted or unsubstituted linear or branched monovalent alkyl group having 1 to 20 carbon atoms, an alicyclic group having 3 to 25 carbon atoms, or an aryl group having 6 to 22 carbon atoms.
2. A polymer comprising:
a repeating unit shown by a general formula (1); and
a polystyrene-reduced weight average molecular weight determined by gel permeation chromatography (GPC) of 3000 to 100,000,
wherein R 1 represents a hydrogen atom or a methyl group, R 2 represents a substituted or unsubstituted linear or branched monovalent alkyl group having 1 to 20 carbon atoms, an alicyclic group having 3 to 25 carbon atoms, or an aryl group having 6 to 22 carbon atoms, and X represents a substituted or unsubstituted methylene group or a substituted or unsubstituted linear, branched or alicyclic hydrocarbon group having 2 to 25 carbon atoms, the polymer further comprising at least one of a repeating unit shown by a general formula (2), a repeating unit shown by a general formula (3), and a repeating unit shown by a general formula (4),
wherein R 4 represents a hydrogen atom or a methyl group, R 5 represents a hydrogen atom or a monovalent organic group, i is an integer from 1 to 3, and j is an integer from 0 to 3,
wherein R 6 represents a hydrogen atom or a methyl group, R 7 represents a hydrogen atom or a monovalent organic group, k is an integer from 1 to 3, and 1 is an integer from 0 to 3,
wherein R 8 represents a hydrogen atom or a methyl group, R 9 represents a hydrogen atom or a monovalent organic group, m is an integer from 1 to 3, and n is an integer from 0 to 3.
3. A radiation-sensitive composition comprising:
an acid-dissociable group-containing polymer that is insoluble or scarcely soluble in alkali and converted into alkali-soluble by an action of an acid, the acid-dissociable group-containing polymer comprising the polymer according to claim 1 ; and
a photoacid generator.
4. A monomer shown by a general formula (M 1-1),
wherein R 10 represents a hydrogen atom or a methyl group, R 11 represents a substituted or unsubstituted linear or branched monovalent alkyl group having 1 to 20 carbon atoms, an alicyclic group having 3 to 25 carbon atoms, or an aryl group having 6 to 22 carbon atoms, and X represents ethylene.
5. The polymer according to claim 1 , further comprising at least one of a repeating unit shown by a general formula (2), a repeating unit shown by a general formula (3), and a repeating unit shown by a general formula (4),
wherein R 4 represents a hydrogen atom or a methyl group, R 5 represents a hydrogen atom or a monovalent organic group, i is an integer from 1 to 3, and j is an integer from 0 to 3,
wherein R 6 represents a hydrogen atom or a methyl group, R 7 represents a hydrogen atom or a monovalent organic group, k is an integer from 1 to 3, and 1 is an integer from 0 to 3,
wherein R 8 represents a hydrogen atom or a methyl group, R 9 represents a hydrogen atom or a monovalent organic group, m is an integer from 1 to 3, and n is an integer from 0 to 3.
6. A radiation-sensitive composition comprising:
an acid-dissociable group-containing polymer that is insoluble or scarcely soluble in alkali and converted into alkali-soluble by an action of an acid, the acid-dissociable group-containing polymer comprising the polymer according to claim 2 ; and
a photoacid generator.